Ozone
Dry Pumps
Air Cooled – Model EV-PA
Air Cooled – Model EV-A
Light Duty – Model EV-S
Medium Duty – Model ESR
Harsh Duty – Model EV-M
Medium Duty – Model EV-X
Harsh Duty – Model EST
High Capacity – Model ESA
Refurbished Dry Pumps
Dry Pump Accessories
Turbomolecular Pumps
Ceramic Bearing – Model EBT
MagLev Bearing – Model EMT
MagLev Bearing – Model MK
MagLev Bearing – Model MK-R
Point-of-Use Abatement
Combustion Wash
Catalyst / Absorption
Wet Scrubber
All-in-one Systems
Chemical Mechanical Planarization Systems
Chemical Mechanical Planarization Systems
Bevel polishing system – Model EAC
Thermal Solutions
Wafer Plating Systems
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Water Delivery Pumps
Model NDC
Model PJ
Ozone
OZC Series
OZW Series
Vacuum Gauges
Foreline Traps
Vacuum Valves
Vacuum Hardware
Service/Support

Ozone Systems

2 results

Ozonized Water Generator – OZW Series

The EBARA Ozonized water generator is capable of continuously feeding clean Ozonized water to meet the requirements of next-generation wet processes through the use of the high concentration ozone generator, OZC Series, a Teflon® hollow fiber membrane and the particle-free pump.

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Ultra-High Concentration Clean Ozonizer – OZC Series

EBARA’s ozone-related equipment includes the Ultra High Concentration Clean Ozonizer (Ozone Gas Generator, OZC) which produces high concentrations of virtually impurity free ozone gas by using a unique trench discharge cell system developed by EBARA.

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