The EBARA Ozonized water generator is capable of continuously feeding clean Ozonized water to meet the requirements of next-generation wet processes through the use of the high concentration ozone generator, OZC Series, a Teflon® hollow fiber membrane and the particle-free pump.
EBARA’s ozone-related equipment includes the Ultra High Concentration Clean Ozonizer (Ozone Gas Generator, OZC) which produces high concentrations of virtually impurity free ozone gas by using a unique trench discharge cell system developed by EBARA.