Thermal Solutions

Thermal Management Systems for Gas Lines, Exhaust Lines, and Forelines

Pump line heating systems work to reduce buildup of solids in many LPCVD, PECVD, CVD, FPD, ALD and Metal Etch vacuum piping systems. The application of heat helps reduce particle generation and eliminates unscheduled maintenance downtime, improving the consistency of yields and saving time and money. Pump line heating systems are compliant with global guidelines and specifications.

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Nitrogen Box Heater

Application: Process Operation
Standard Operation: Heats Nitrogen up to 200˚C

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Ceramic Fiber Cloth Heater Jackets

Application: Process Operation
Standard Operation: Temperature Control

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Controllers

Application: Fore, Semiconductor
Standard Operation: 0 to 70°C (32 to 158°F)

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Controllers – HCS/HMI

Application: Fore, Semiconductor
Standard Operation: Heater Control

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Ebara VSN Heater Control System

Application: Fore, Semiconductor
Standard Operation: Temperature Control

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Silicone Rubber Heater Jackets

Application: Process Operation
Standard Operation: Uniform mid to (max 150 Degrees C)

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