Turbomolecular Vacuum Pumps
EBARA is a global leader in vacuum pump technology and our turbomolecular pumps are designed to offer the highest performance and reliability. From our design labs to final test, our manufacturing capabilities ensures each product we deliver has the exceptional reliability you expect.
EBARA Technologies, Inc. offers a full range of turbomolecular pumps for multiple applications.
EBARA Ceramic Bearing Series
The EBT series of turbomolecular pumps is a full line of ceramic bearing pumps suitable for Analytical and R&D vacuum needs. The EBT Ceramic Bearing compound design is extremely rugged, making it ideal for multiple high vacuum applications.
EBARA MagLev Bearing Series
EBARA’s MagLev series turbomolecular pumps offer robust 5-axis MagLev technology. These pumps are designed for the harshest semiconductor processes as well as ultra-high vacuum and ultra-low vibration applications.
Ceramic Bearing - Model EBT
The EBT series are highly efficient, cost-effective solutions that provide clean and reliable vacuum generation for your high vacuum applications. The new compound design rotors can withstand infrequent shock treatment during high flow or vent conditions. Improved efficiency results in higher pumping speeds and gas compression. This accommodates higher foreline pressures making them ideal for multiple applications including UHV, mobile vacuum carts, and analytical systems.
MagLev Bearing - Model EMT
The EMT Series are magnetically levitated bearing compound turbomolecular pumps, an alternative to EBARA’s line of EBT Ceramic turbomolecular pumps. Each model in the range offers exceptional value and is equipped with the latest active maglev technology for years of reliable trouble free operation. Our robust design can withstand infrequent shock treatment during high flow or vent conditions and the special coated corrosive resistant models handle the harshest chemistries. Various models available for multiple applications including semiconductor processes, in line coaters, UHV, beamlines and analytical systems.
MagLev Bearing - Model MK
MK series offers increased performance over the EMT range. An all in one installation with integrated onboard controller and a choice of various industrial communication modules. The MK series produces higher pumping speeds and throughput up to 4200l/s. Multi-process versions – UHV, inline coaters, e-beam systems and corrosive processes.
MagLev Bearing - Model MK-R
MK-R series has the same advanced features as the MK range but is equipped with a separate rack mount controller. This option increases throughput performance and reduces overall form/fit of the turbo for a compact installation. Designed for the next generation of coating and etch tool platforms.
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