All of EBARA’s turbomolecular pumps are compound turbo pumps, adding a second molecular drag stage to the same shaft. Adding this stage increases the compression ratio of the pump and also greatly increases the highest allowable foreline pressure of the pump.
EBARA Technologies, Inc. offers a full range of turbomolecular pumps for multiple applications.
The EBT series of turbomolecular pumps is a full line of ceramic bearing pumps suitable for Analytical and R&D vacuum needs. The EBT Ceramic Bearing system is extremely rugged, making it ideal for mobile applications.
EBARA’s MagLev series turbomolecular pumps offer robust 5-axis MagLev technology. These pumps are designed for the harshest semiconductor processes as well as ultra-high vacuum and ultra-low vibration applications.