Turbomolecular Pumps

Turbomolecular Vacuum Pumps

All of EBARA’s turbomolecular pumps are compound turbo pumps, adding a second molecular drag stage to the same shaft. Adding this stage increases the compression ratio of the pump and also greatly increases the highest allowable foreline pressure of the pump.

EBARA Technologies, Inc. offers two complete lines of turbomolecular pumps: the EMT series and the EBT series.

EBARA EMT Series Turbo Pumps

The EMT series turbomolecular pumps are 5-axis MagLev pumps that are completely hydrocarbon free. These pumps are suitable for varied applications from the harshest semiconductor application as well as ultra-high vacuum and ultra-low vibration applications.

EBARA EBT Series Turbo Pumps

The EBT series of turbomolecular pumps is a full line of ceramic bearing pumps suitable for Analytical and R&D vacuum needs. The EBT Ceramic Bearing system is extremely rugged, making it ideal for mobile applications. The EBT70 and EBT240 pumps are available with an integrated controller.

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Bearing – Model EBT

The compound turbo pumps in the EBT Series can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high-volume light gas compression, making them ideal for UHV and analytical systems. The EBT70 and EBT240 pumps are available with an optional integrated controller.

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Mag Lev – Model EMT

The EMT Series offers five major types of magnetic turbomolecular pumps, temperature-controlled, corrosion resistant, ultra-low vibration, radiation resistant, and ultra-high vacuum.

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