Turbomolecular Pumps

Turbomolecular Vacuum Pumps

All of EBARA’s turbomolecular pumps are compound turbo pumps, adding a second molecular drag stage to the same shaft. Adding this stage increases the compression ratio of the pump and also greatly increases the highest allowable foreline pressure of the pump.

EBARA Technologies, Inc. offers a full range of turbomolecular pumps for multiple applications.

EBARA EBT Ceramic Bearing Series

The EBT series of turbomolecular pumps is a full line of ceramic bearing pumps suitable for Analytical and R&D vacuum needs. The EBT Ceramic Bearing system is extremely rugged, making it ideal for mobile applications.


EBARA’s MagLev series turbomolecular pumps offer robust 5-axis MagLev technology. These pumps are designed for the harshest semiconductor processes as well as ultra-high vacuum and ultra-low vibration applications.

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Ceramic Bearing – Model EBT

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The EBT Series can be mounted in any orientation and are ideal for mobile applications. They offer high pumping speed and compression ratios, making them ideal for UHV and analytical systems.

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MagLev – Model EMT

The EMT Series magnetic turbomolecular pumps come in a variety of models including temperature-controlled, corrosion resistant, ultra-high vacuum (UHV) , ultra-low vibration and radiation resistant.

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