The MK-R Series are magnetically levitated bearing compound turbomolecular pumps. A higher performance option with higher throughput capabilities than EBARA’s line of EMT MagLev turbomolecular pumps. The MK-R series offer highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high vacuum applications.
All EBARA MagLev pump part numbers reference pumping speed, flange type required and application. Use table below as a guide.
Pumping Speed N2 : 1650 l/s
Inlet Flange options: ISO-F200, CF200
Pumping Speed N2 : 2200 l/s
Inlet Flange options: ISO-F250, CF250
Pumping Speed N2 : 3300 l/s
Inlet Flange options: ISO-F320
Pumping Speed N2 : 4200 l/s
Inlet Flange options: ISO-F400