MagLev Bearing - Model MK-R
Dry Pumps
Air Cooled – Model EV-PA
Air Cooled – Model EV-A
Light Duty – Model EV-S
Medium Duty – Model ESR
Harsh Duty – Model EV-M
Medium Duty – Model EV-X
Harsh Duty – Model EST
High Capacity – Model ESA
Refurbished Dry Pumps
Dry Pump Accessories
Turbomolecular Pumps
Ceramic Bearing – Model EBT
MagLev Bearing – Model EMT
MagLev Bearing – Model MK
MagLev Bearing – Model MK-R
Point-of-Use Abatement
Combustion Wash
Catalyst / Absorption
Wet Scrubber
All-in-one Systems
Chemical Mechanical Planarization Systems
Chemical Mechanical Planarization Systems
Bevel polishing system – Model EAC
Thermal Solutions
Water Delivery Pumps
Model NDC
Model PJ
Ozone
OZC Series
OZW Series
Vacuum Gauges
Foreline Traps
Vacuum Valves
Vacuum Hardware
Service/Support

MagLev Bearing - Model MK-R

The MK-R Series are magnetically levitated bearing compound turbomolecular pumps. A higher performance option with higher throughput capabilities than EBARA’s line of  EMT MagLev turbomolecular pumps. The MK-R series offer highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high vacuum applications.

All EBARA MagLev pump part numbers reference pumping speed, flange type required and application. Use table below as a guide.

4 results

Model EMT1700MK-R

Pumping Speed N2 : 1650 l/s
Inlet Flange options: ISO-F200, CF200

Select options

Model EMT2200MK-R

Pumping Speed N2 : 2200 l/s
Inlet Flange options: ISO-F250, CF250

Select options

Model EMT3300MK-R

Pumping Speed N2 : 3300 l/s
Inlet Flange options: ISO-F320

Select options

Model EMT4200MK-R

Pumping Speed N2 : 4200 l/s
Inlet Flange options: ISO-F400

Select options

© 2023 EBARA Technologies, Inc.

51 Main Avenue, Sacramento, CA 95838