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Ebara provides a broad range of adapter fittings in order to connect two dissimilar types of components. They are made from 304 or 316L stainless steel and are TI G welded, cleaned and leak checked for vacuum service. Tube finishes are normally bead blasted. However, tumbled or electropolished finish can be provided upon request.
Ebara CF flanges are compatible with other Conflat style flanges and are available in sizes from 1-1/3 to 16-1/2 inch OD for 1/4 to 14 inch tube diameters. Flanges 41/2 inch OD and smaller are made from 304 electroslag remelt (ESR) bar stock. ESR is a refining process that produces stainless steel with higher purity, fewer inclusions and more uniform grain structure to eliminate microscopic leak paths.
Weld fittings are commonly used in vacuum roughing lines on semiconductor process equipment and for forelines and pump exhaust lines in semiconductor subfabs. All tees and crosses are fabricated with the pulled-port technique and full penetration butt welds. This provides crevice-free weld joints and the maximum in cleanliness for UHV applications
Ebara wire seal flanges are designed for use on bell jars, custom vacuum chambers and related systems. Standard sizes range from 12 to 27 inch nominal OD for tube sizes from 10 to 24 inch OD. A male and female flange compress a 0.080 inch diameter OFHC copper wire to effect a seal. Gasket flow is confined by the geometry of the flange surfaces to the area of the seal.