Vacuum Hardware

Vacuum Pump Parts & Hardware

EBARA offers a complete line of stainless steel vacuum hardware designed to complement dry pumps, turbo pumps and abatement systems.

Call 800-535-5376 for additional product information and availability.

ASA

ASA

Ebara's ASA flanges are manufactured from specially treated 304 stainless steel. These flanges mate with standard 150 lb. ASA flanges or 150 ANSI flanges. They are available from stock for standard tube sizes from 2 to 12 inches. Larger sizes are available upon request.

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Conflat

Conflat

Ebara CF flanges are compatible with other Conflat style flanges and are available in sizes from 1-1/3 to 16-1/2 inch OD for 1/4 to 14 inch tube diameters. Flanges 41/2 inch OD and smaller are made from 304 electroslag remelt (ESR) bar stock. ESR is a refining process that produces stainless steel with higher purity, fewer inclusions and more uniform grain structure to eliminate microscopic leak paths.

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ISO

ISO

Ebara ISO flanges and hardware are manufactured to the International Standards Organization specification so they can be mated to other manufacturers' ISO flanges.

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KF

KF

Ebara Technologies, Inc. offers a wide range of KF flanges, fittings and accessories to fit your needs.

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Welded Fittings

Welded Fittings

Weld fittings are commonly used in vacuum roughing lines on semiconductor process equipment and for forelines and pump exhaust lines in semiconductor subfabs. All tees and crosses are fabricated with the pulled-port technique and full penetration butt welds. This provides crevice-free weld joints and the maximum in cleanliness for UHV applications

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Wire Seal

Wire Seal

Ebara wire seal flanges are designed for use on bell jars, custom vacuum chambers and related systems. Standard sizes range from 12 to 27 inch nominal OD for tube sizes from 10 to 24 inch OD. A male and female flange compress a 0.080 inch diameter OFHC copper wire to effect a seal. Gasket flow is confined by the geometry of the flange surfaces to the area of the seal.

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