They are compatible with other manufacturers’ ISO-KF style flanges. KF flanges utilize an aluminum clamp with a single wingnut fastener or a lock-over-center clamp allowing frequent disassembly without tools. The vacuum seal is effected by the application of uniform pressure from the clamp on the 15° surface of the 304 stainless steel flanges.
The mating flange surfaces compress a Viton O-ring held in place by a centering ring. The resultant seal can be used in vacuum applications of up to 10-8 Torr and baked to 204°C, however, sustained baking above 150°C may result in deterioration of O-rings.
KF flanges allow components to be rotated before assembly for ease of components and fittings. KF flanges are available on virtually all Ebara components and fittings. Ebara manufactures a full line of KF adapters so you can add to or build an entire system with KF components. KF flanges can also be used with EVAC chain clamps and aluminum seals to obtain a UHV seal bakeable to to 150°C….