Protection Valves
Dry Pumps
Air Cooled – Model EV-PA
Air Cooled – Model EV-A
Light Duty – Model EV-S
Medium Duty – Model ESR
Harsh Duty – Model EV-M
Medium Duty – Model EV-X
Harsh Duty – Model EST
High Capacity – Model ESA
Refurbished Dry Pumps
Dry Pump Accessories
Turbomolecular Pumps
Ceramic Bearing – Model EBT
MagLev Bearing – Model EMT
MagLev Bearing – Model MK
MagLev Bearing – Model MK-R
Point-of-Use Abatement
Combustion Wash
Catalyst / Absorption
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All-in-one Systems
Chemical Mechanical Planarization Systems
Chemical Mechanical Planarization Systems
Bevel polishing system – Model EAC
Thermal Solutions
Wafer Plating Systems
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Water Delivery Pumps
Model NDC
Model PJ
Ozone
OZC Series
OZW Series
Vacuum Gauges
Foreline Traps
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Vacuum Hardware
Service/Support

Protection Valves

Protection Valves are fast acting shut-off valves that close when power is shut-off. These valves protect valuable equipment by preventing backstreaming of particles and other contaminants.

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Vacuum Safety Valve Kits

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