Products

EBARA’s Products

The Component Division of EBARA Technologies Inc. supplies advanced vacuum and abatement systems as well as other equipment focused on the needs of the semiconductor, photovoltaic and R&D sectors. Our industry-leading exhaust management solutions consist of dry vacuum pumps, turbomolecular pumps, point-of-use abatement, exhaust line heaters, vacuum hardware and related services.

Our Systems Division supplies advanced technologies for front-end and back-end semiconductor manufacturing. EBARA is a leading supplier of 200 mm and 300mm Chemical Mechanical Polishing systems (CMP), advanced Wafer Plating Systems, Bevel and Backside Clean Treatment Systems.

Explore the categories below to see our products and application specifications below. For any questions, please contact us and we will be happy to assist you.

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All-in-one Systems

All-in-one Systems

EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology an...

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Dry Pumps

Dry Pumps

EBARA is a world-leader in the design and manufacture of "dry" vacuum pumps. EBARA dry vacuum pumps ...

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Foreline Traps

Foreline Traps

We offer a variety of standard and custom foreline traps designed for trapping toxic gasses and part...

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Particulate Removal

Particulate Removal

Particulate traps remove particles over 10 microns in size at 98% efficiency to prevent contaminatio...

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Ozone

Ozone

EBARA’s ozone-related equipment includes the Ultra High Concentration Clean Ozonizer (Ozone Gas Ge...

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Point-of-Use Abatement

Point-of-Use Abatement

EBARA Technologies Inc. offers a full line of comprehensive Point-of-Use Abatement (POU) systems for...

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Thermal Solutions

Thermal Solutions

Vacuum pump and gas lines have unique thermal challenges, including the poor conductivity of stainle...

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Turbomolecular Pumps

Turbomolecular Pumps

All of EBARA’s turbomolecular pumps are compound turbo pumps, adding a second molecular drag stage...

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Vacuum Gauges

Vacuum Gauges

EBARA Technologies, Inc.'s vacuum pump gauges can be used in a wide variety of applications includin...

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Vacuum Hardware

Vacuum Hardware

We offer a complete line of stainless steel vacuum hardware designed to complement our ...

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Water Delivery Pumps

Water Delivery Pumps

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Bevel Polishing Systems

Bevel Polishing Systems

EBARA’s Model EAC is a bevel polishing system to address an edge and/or its surrounding area of se...

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Chemical Mechanical Planarization Systems

Chemical Mechanical Planarization Systems

EBARA’s Applications Engineering groups in Japan and the U.S. continue to push the envelope requir...

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Wafer Plating Systems

Wafer Plating Systems

EBARA’s wafer plating equipment is perfect for creating RF amplifiers, LEDs, CPU components, and m...

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