EBARA’s Products
The Component Division of EBARA Technologies Inc. supplies advanced vacuum and abatement systems as well as other equipment focused on the needs of the semiconductor, photovoltaic and R&D sectors. Our industry-leading exhaust management solutions consist of dry vacuum pumps, turbomolecular pumps, point-of-use abatement, exhaust line heaters, vacuum hardware and related services.
Our Systems Division supplies advanced technologies for front-end and back-end semiconductor manufacturing. EBARA is a leading supplier of 200 mm and 300mm Chemical Mechanical Polishing systems (CMP), advanced Wafer Plating Systems, Bevel and Backside Clean Treatment Systems.
Explore the categories below to see our products and application specifications below. For any questions, please contact us and we will be happy to assist you.
All-in-one Systems
EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology an...
Dry Pumps
EBARA is a world-leader in the design and manufacture of "dry" vacuum pumps. EBARA dry vacuum pumps ...
Foreline Traps
We offer a variety of standard and custom foreline traps designed for trapping toxic gasses and part...
Particulate Removal
Particulate traps remove particles over 10 microns in size at 98% efficiency to prevent contaminatio...
Ozone
EBARA’s ozone-related equipment includes the Ultra High Concentration Clean Ozonizer (Ozone Gas Ge...
Point-of-Use Abatement
EBARA Technologies Inc. offers a full line of comprehensive Point-of-Use Abatement (POU) systems for...
Thermal Solutions
Vacuum pump and gas lines have unique thermal challenges, including the poor conductivity of stainle...
Turbomolecular Pumps
All of EBARA’s turbomolecular pumps are equipped with a compound rotor. This design adds a molecul...
Vacuum Gauges
EBARA Technologies, Inc.'s vacuum pump gauges can be used in a wide variety of applications includin...
Vacuum Hardware
We offer a complete line of stainless steel vacuum hardware designed to complement our ...
Bevel Polishing Systems
EBARA’s Model EAC is a bevel polishing system to address an edge and/or its surrounding area of se...
Chemical Mechanical Planarization Systems
EBARA’s Applications Engineering groups in Japan and the U.S. continue to push the envelope requir...
Wafer Plating Systems
EBARA’s wafer plating equipment is perfect for creating RF amplifiers, LEDs, CPU components, and m...
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51 Main Avenue, Sacramento, CA 95838
