EBARA’s Products
The Component Division of EBARA Technologies Inc. supplies advanced vacuum and abatement systems as well as other equipment focused on the needs of the semiconductor, photovoltaic and R&D sectors. Our industry-leading exhaust management solutions consist of dry vacuum pumps, turbomolecular pumps, point-of-use abatement, exhaust line heaters, vacuum hardware and related services.
Our Systems Division supplies advanced technologies for front-end and back-end semiconductor manufacturing. EBARA is a leading supplier of 200 mm and 300mm Chemical Mechanical Polishing systems (CMP), advanced Wafer Plating Systems, Bevel and Backside Clean Treatment Systems.
Explore the categories below to see our products and application specifications below. For any questions, please contact us and we will be happy to assist you.
Dry Pumps
EBARA is a world-leader in the design and manufacture of 'Dry' vacuum pump technology....
Turbomolecular Pumps
Our turbomolecular pumps are designed to offer the highest performance and reliability....
Point-of-Use Abatement
We offer a full line of comprehensive Point-of-Use (POU) Abatement systems....
All-in-one Systems
EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology an...
Thermal Solutions
Vacuum pump and gas lines have unique thermal challenges, including the poor conductivity of stainle...
Ozone
EBARA’s ozone-related equipment includes the Ultra High Concentration Clean Ozonizer (Ozone Gas Ge...
Vacuum Gauges
EBARA Technologies, Inc.'s vacuum pump gauges can be used in a wide variety of applications includin...
Foreline Traps
We offer a variety of standard and custom foreline traps designed for trapping toxic gasses and part...
Vacuum Hardware
We offer a complete line of stainless steel vacuum hardware designed to complement our ...
Chemical Mechanical Planarization Systems
EBARA’s Applications Engineering groups in Japan and the U.S. continue to push the envelope requir...
Bevel Polishing Systems
EBARA’s Model EAC is a bevel polishing system to address an edge and/or its surrounding area of se...
© 2023 EBARA Technologies, Inc.
51 Main Avenue, Sacramento, CA 95838
