Combustion Wash

List Price

EBARA Technologies Inc. offers a line of combustion-wash (burner washer) Point-of-Use (POU) Abatement systems. EBARA’s burner-washers are based on the principle of gas decomposition by combustion. This technology offers the greatest flexibility for exhaust gas abatement for the effluent gases used in both semiconductor and photovoltaic manufacturing.

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Description

EBARA Technologies Inc. offers a line of combustion-wash (burner washer) Point-of-Use (POU) Abatement systems. EBARA’s burner-washers are based on the principle of gas decomposition by combustion. This technology offers the greatest flexibility for exhaust gas abatement for the effluent gases used in both semiconductor and photovoltaic manufacturing.

EBARA’s patented burner technology produces high temperatures that allow high abatement efficiencies for the process gases including perfluorinated gases (PFC’s). Learn about the specifications of our models below or contact us for more information.

Features

  • High efficient burner washer (e.g. >99% for PFC’s) for low and high waste gas flows.
  • Highest standards of safety to eliminate any risks for operators and environment.
  • Lowest Cost of Ownership through low utility costs and by long maintenance intervals.
  • No risk of corrosion – all pipes are coated inside with corrosion resistant material. No neutralization agent is necessary.
  • The system operates with city water, no water pre-conditioning is required.
  • Automatic scrapers for mechanical cleaning of reactor and burner prevent blockages allow cleaning without opening the system and reduce the preventive maintenance impact.
  • Flexible burning gases are possible.
  • Best possible reduction of nitrogen oxides (NOx) by small amounts of purge gas necessary. That is especially true in combination with EBARA dry vacuum pumps with their small amounts of N2 purge required.
  • Various operation modes: high, medium, low and idle operation mode allow to save utilities cost.