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> Products > EVIS™ System

EVIS™ System

Integrated dry vacuum pumping and combustion abatement in a single platform designed to simplify harsh-process exhaust management, reduce infrastructure complexity, and support higher uptime in semiconductor manufacturing environments.

Integrated Vacuum &
Abatement System

Ebara Technologies’  EVIS™ System delivers a streamlined approach to semiconductor exhaust management by combining critical vacuum and abatement technologies into a single integrated solution.

EVIS™

EVIS™

System Integration

System Integration vacuum pumping + combustion abatement

Cost of Ownership

Cost of Ownership reduced CAPEX and OPEX

Maintenance Advantage

Maintenance Advantage automated water-flush cleaning

The EVIS™ System combines dry vacuum pumping, combustion abatement, and integrated heater functions within a shared footprint to simplify harsh-process exhaust management. Advanced combustion control, automated water-flush technology, and byproduct-management features help reduce maintenance requirements, support predictable service planning, and maximize production uptime.

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Features

Compact footprint combining pumping and abatement in one platform
Automated water flush technology for byproduct removal
Maintenance cycle reduced to approximately 45 minutes
Two-stage combustion with water curtain to minimize byproduct buildup
High-torque burner scraper for continuous byproduct management
Automatic drain and water tank design for extended maintenance intervals
NF₃ destruction efficiency (DRE) greater than 99% with thermal NOx below 20 ppm
Designed to increase uptime through simplified maintenance and longer operating intervals

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