Dry Vacuum Pumps
EBARA is a world-leader in the design and manufacture of "dry" vacuum pumps. EBARA dry vacuum pumps provide a host of product advantages including:
- increased reliability
- reduced clean room particulate load
- low noise
- low vibration
- lower operating costs
- lowest cost-of-ownership when compared with other dry vacuum pumps on the market today.
Diversified product lines make EBARA the industry leader in vacuum abatement technology and service. EBARA's dry vacuum pumps survive the harshest applications such as LPCVD, PECVD, CVD, and metal etch. EBARA's dry pumps are also perfect for many applications in the semiconductor industry, and any application where oil backstreaming is unacceptable. Learn about our models below, or contact us for more information.