With EBARA’s unique compact construction with low noise and low power consumption, this air-cooled pump series needs no coolant water enabling flexible installations suitable for many vacuum applications within various environments such as production plants, testing and research laboratories.
The Model EV-A06 Series vacuum pumps are designed for repeated pumping performance from atmospheric pressure down to the millitorr range. These are ideal replacements for wet pumps and scroll pumps; no more frequent oil changes or rebuilds and zero base pressure drift.
Typical applications for EV-A06 dry pumps include load locks, PVD systems, analytical instruments, metrology equipment. Perfect for all applications that require the best vacuum performance and optimum uptime.