Model EV-A06

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Pumping Speed 22 cfm : 600 l/min

Description

With EBARA’s unique compact construction with low noise and low power consumption, this air-cooled pump series needs no coolant water enabling flexible installations suitable for many vacuum applications within various environments such as production plants, testing and research laboratories.

The Model EV-A06 Series vacuum pumps are designed for repeated pumping performance from atmospheric pressure down to the millitorr range. These are ideal replacements for wet pumps and scroll pumps; no more frequent oil changes, costly rebuilds or base pressure drift.

Typical applications for EV-A06 dry pumps include load locks, PVD systems, analytical instruments, metrology equipment and ideal for wet/scroll replacements that require the best vacuum performance and optimum uptime.

Features

• Oil-Free
• Low Energy Consumption
• Compact/Lightweight Small Footprint
• Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
• Various Pump Configurations According to Process Applications
• Air-Cooling Pump for Non-Reactive Gases
• Low Noise
• No-Contact Design
• High Pumping Speeds at Atmosphere

Applications

• Analytical Instruments (LCMS, ICPMS, Mass Spec & Electron Microscopes)
• Freeze & Vacuum Drying
• Lithium-Ion Battery Manufacturing
• Load Locks
• Oxygen Plasma Systems
• Physical Vapor Deposition (PVD)
• Plasma Cleaning
• Sputtering

Specifications - Model EV-A06

ModelEV-AEV-AEV-A
A03A06A10
Pumping SpeedMax.L/min2506001000
CFM92236
m3/hr153660
AtmosphericL/min150480800
CFM5.41729
m3/hr92948
Ultimate PressureGas Ballast: OffPa1
mBar0.01
mTorr7.5
Gas Ballast: OnPa102
mBar0.10.02
mTorr7515
Approx.Power at Ultimate PressurekW0.350.551.1
Max. Inlet PressureAtmospheric Pressure
Max. Water Vapor Pumping Rate (Gas Ballast: On)g/hr250350500
ConnectionGas InletNW25NW40
Gas OutletNW25NW40
UtilityPower Supply1 Phase, 100-115V, 50/60Hz
1 Phase, 200-240V, 50/60Hz
3 Phase, 200-240V, 50/60Hz
Weightkg235475
lb51119165
Airborne Noise Test Datadb(A)<56<57<58

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