Model EV-A10P

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Pumping Speed 36 cfm : 1,000 l/min

Description

The EV-A10 Series air cooled dry vacuum pumps have industry leading specifications. The non-contact, multi-staged roots technology is designed for reliable, particle free vacuum generation. Compact form factor and air cooling for easy installation. These are ideal drop in replacements for wet pumps and scroll pumps; no more frequent oil changes, costly rebuilds or base pressure drift.

Options:

  • Single- and 3-Phase, 50/60 Hz, 200-240VAC Models
  • N2 Purge Capability
  • Side exhaust (top optional)
  • Hardware: Check Valves & Silencers
  • Pump Systems – Integrated Rack Solutions
  • Pump Installation Lifts
  • Reusable Shipping Crates with Optional Ramp

Typical applications for EV-A10 dry pumps include load locks, PVD systems, analytical instruments, metrology equipment. Ideal replacement for rotary vane oil pumps or scroll pumps on systems that require an upgrade in vacuum performance and uptime.

Features

• Oil-Free
• Low Energy Consumption
• Compact/Lightweight Small Footprint
• Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
• Various Pump Configurations According to Process Applications
• Air-Cooling Pump for Non-Reactive Gases
• Low Noise
• No-Contact Design
• High Pumping Speeds at Atmosphere
• High Water Vapor Pumping
• Plug and Play for Flexible Installation
• SEMI S2, CE and NRTL

Applications

  • Analytical Instruments (LCMS, ICPMS, Mass Spec & Electron Microscopes)
  • Atomic Layer Deposition (ALD)
  • Freeze & Vacuum Drying
  • Lithium-Ion Battery Manufacturing
  • Load Locks
  • Oxygen Plasma Systems
  • Packaging
  • Physical Vapor Deposition (PVD)
  • Plasma Cleaning
  • Solvent Cleaning
  • Sputtering

Specifications - Model EV-A10

ModelEV-AEV-AEV-A
A03A06A10
Pumping SpeedMax.L/min2506001000
CFM92236
m3/hr153660
AtmosphericL/min150480800
CFM5.41729
m3/hr92948
Ultimate PressureGas Ballast: OffPa1
mBar0.01
mTorr7.5
Gas Ballast: OnPa102
mBar0.10.02
mTorr7515
Approx.Power at Ultimate PressurekW0.350.551.1
Max. Inlet PressureAtmospheric Pressure
Max. Water Vapor Pumping Rate (Gas Ballast: On)g/hr250350500
ConnectionGas InletNW25NW40
Gas OutletNW25NW40
UtilityPower Supply1 Phase, 100-115V, 50/60Hz
1 Phase, 200-240V, 50/60Hz
3 Phase, 200-240V, 50/60Hz
Weightkg235475
lb51119165
Airborne Noise Test Datadb(A)<56<57<58

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