Medium Duty – Model ESA

List Price

The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

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Description

The ESA Series consists of a two-stage main pump design engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.

The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

Features

  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Variable pumping speed to match application requirements
  • High performance brushless DC motor on the booster pump
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked

Applications

  • (For Model ESA25-100) Ideal for light gas pumping MOCVD processing
  • (For Model ESA200-500) Ideal for large-volume atmospheric, load lock processes

Specifications - Model ESA

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51 Main Avenue, Sacramento, CA 95838