Harsh Duty – Model EST

List Price

The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

Clear
Category:

Description

The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.

The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

Features

  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Variable pumping speed to match application requirements
  • High performance brushless DC motors
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked

Applications

  • CVD Process
  • Etching Process
  • High Pumping Speed / High Gas Load Requirement

Specifications - Model EST

© 2023 EBARA Technologies, Inc.

51 Main Avenue, Sacramento, CA 95838