Typical applications for the Model ESR30 dry vacuum pump include load locks, SEM, Etch, CVD, PVD, ashing and ion implant processes that require the best vacuum performance and optimum uptime.
The ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and intelligent controls for throttle adjustments and idle mode utilizations.
Pumping Speed (60 Hz): 3,000 l/min
Options:
| Model | ESR | ESR | ESR | ESR | ESR | ESR | ESR | ||||
| 20N | 30/N | 80WN | 100WN | 200WN | 300WN | 500WN | |||||
| Pumping Speed | L/min | 1,300～ | 3000 | 4,000～ | 4,000～ | 10,000～ | 30,000 | 46,000 | |||
| 2,000 | 8,500 | 10,000 | 20,000 | ||||||||
| Ultimate Pressure | Pa | 2 | 0.53-0.67 | 0.2-0.5 | 0.2 | 0.5-0.13 | 0.2 | 0.2 | |||
| Connection | Gas Inlet | NW40 | NW50 | NW100 | ISO160 | ||||||
| Gas Outlet | NW40 | ||||||||||
| Approx.Power at Ultimate Pressure | kW | 0.7 | 1.7 | 1 | 1.1 | 2.9 | 3.1 | ||||
| Utility | Cooling | Flow rate | L/min | 2～8 | 3.5～8 | 2～8 | 2～5 | 3.5～8 | |||
| Water | Temperature | ℃ | Max. 30 | ||||||||
| N2 Gas | Approx. Flow rate | Pa•m3/s | 19～22 | 19～22 | 17～22 | 17～22 | 19～22 | ||||
| N2-0 Mode | 0 | -3.4 | -3.4 | -4 | -3.4 | ||||||
| Power Supply | Phase/Volt/Freq. | 200V Model | 3Phase/200V/50Hz | ||||||||
| 3Phase/200-220V/60Hz | |||||||||||
| 400V Model | 3Phase/380-400V/50Hz | ||||||||||
| 3Phase/380-440V/60Hz | |||||||||||
| Power capacity | kVA | 4 | 7 | 8 | 10.6 | 12.3 | |||||
| Weight | kg | 90 | 190 | 170 | 180 | 250 | 390 | 500 | |||
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51 Main Avenue, Sacramento, CA 95838
