Description
Typical applications for the Model ESR30 dry vacuum pump include load locks, SEM, Etch, CVD, PVD, ashing and ion implant processes that require the best vacuum performance and optimum uptime.
Options:
- NiResist Cast Material for Superior Corrosion Resistance
- Alternate Exhaust Thermal Configurations (Process Dependent)
- On Tool Configurations Models
- ESD Resistance
- Idle Mode (Green Energy Mode)
- Hardware: Seismic Brackets
- Pump Systems – Integrated Rack Solutions
- Pump Installation Lifts
- Reusable Shipping Crates
The ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and intelligent controls for throttle adjustments and idle mode utilizations.
