Model EST25N

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Pumping Speed (60 Hz): 2,500 l/min

Description

EST25N dry (oil free) vacuum pumps are designed as stand-alone screw pumps constructed of NiResist, a solid cast material known for its superior corrosion resistance, best suited for harsh, powdery and corrosive applications.                       

Options:

  • Various Booster & Exhaust Thermal Configurations (Process Dependent)
  • Idle Mode (Green Energy Mode)
  • Hardware: Seismic Brackets
  • Pump Systems – Integrated Rack Solutions
  • Pump Installation Lifts
  • Reusable Shipping Crates

Specifically engineered for harsh applications generating reactive chemical by-products and manufactured to be the lowest cost of ownership pumps on the market today.

Features

  • Oil-Free
  • Low Energy Consumption: High Performance Brushless DC Motors
  • Compact/Lightweight Small Footprint
  • Various Pump Configurations According to Process Applications
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Advanced Warning & Alarm Data Storage Capability
  • Hands On Feature for Warning Settings via Programmable LCD Controller
  • Ideal Configuration for Powdery Harsh & Chemically Corrosive Application (High Thermal Profile & NiResist Construction Material)
  • Large Pumping Capacity and High Gas Load Stability
  • Intelligent Rotor RPM Control Function for Flexible Gas Throughput
  • Variable Pumping Speed to Match Application Requirements
  • State-Of-The-Art Control and Monitoring Devices
  • SEMI S2, CE And NRTL

Applications

  • Atomic Layer Deposition (ALD)
  • Chemical Vapor Deposition (CVD) Processes Including LPCVD, HDP-CVD, SACVD & MOCVD
  • Etching
  • High Pumping Speed & High Gas Load Requirements
  • Rapid Thermal Processing (RTP)

Specifications - Model EST25N

ModelESTESTESTESTESTEST
10N25N100WN200WN300WN500WN
Pumping SpeedL/min1000250010000200003000050,000
Ultimate PressurePa2.70.4
ConnectionGas InletNW40NW50NW100ISO160
Gas OutletNW40
Approx. Power at Ultimate PressurekW2.333.24.54.6
UtilityCoolingFlow rateL/min5~8
WaterTemperatureMax. 30
N2 GasApprox. Flow ratePa•m3/s13~1824~2928~31
N2-0 Mode
Power SupplyPhase/Volt/Freq.200V Model3Phase/200V/50Hz
3Phase/200-220V/60Hz
400V Model3Phase/380-400V/50Hz
3Phase/380-440V/60Hz
Power capacitykVA4.67.38.28.512.715.1
Weightkg260300380430500550