Description
Options:
- Various Booster & Exhaust Thermal Configurations (Process Dependent)
- Idle Mode (Green Energy Mode)
- Hardware: Seismic Brackets
- Pump Systems – Integrated Rack Solutions
- Pump Installation Lifts
- Reusable Shipping Crates
Model EST500WN
EST500WN dry (oil free) vacuum pumps are designed as stand-alone screw pumps constructed of NiResist, a solid cast material known for its superior corrosion resistance, best suited for harsh, powdery and corrosive applications.
Specifically engineered for harsh applications generating reactive chemical by-products and manufactured to be the lowest cost of ownership pumps on the market today.
Pumping Speed (60 Hz): 30,000 l/min
Features
- Oil-Free
- Low Energy Consumption: High Performance Brushless DC Motors
- Compact/Lightweight Small Footprint
- Various Pump Configurations According to Process Applications
- Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
- Advanced Warning & Alarm Data Storage Capability
- Hands On Feature for Warning Settings via Programmable LCD Controller
- Ideal Configuration for Powdery Harsh & Chemically Corrosive Application (High Thermal Profile & NiResist Construction Material)
- Large Pumping Capacity and High Gas Load Stability
- Intelligent Rotor RPM Control Function for Flexible Gas Throughput
- Variable Pumping Speed to Match Application Requirements
- State-Of-The-Art Control and Monitoring Devices
- SEMI S2, CE And NRTL
Applications
- Atomic Layer Deposition (ALD)
- Chemical Vapor Deposition (CVD) Processes Including LPCVD, HDP-CVD, SACVD & MOCVD
- Etching
- High Pumping Speed & High Gas Load Requirements
- Rapid Thermal Processing (RTP)
Specifications - Model EST500WN
| Model | EST | EST | EST | EST | EST | EST | |||||
| 10N | 25N | 100WN | 200WN | 300WN | 500WN | ||||||
| Pumping Speed | L/min | 1000 | 2500 | 10000 | 20000 | 30000 | 50,000 | ||||
| Ultimate Pressure | Pa | 2.7 | 0.4 | ||||||||
| Connection | Gas Inlet | NW40 | NW50 | NW100 | ISO160 | ||||||
| Gas Outlet | NW40 | ||||||||||
| Approx. Power at Ultimate Pressure | kW | 2.3 | 3 | 3.2 | 4.5 | 4.6 | |||||
| Utility | Cooling | Flow rate | L/min | 5~8 | |||||||
| Water | Temperature | ℃ | Max. 30 | ||||||||
| N2 Gas | Approx. Flow rate | Pa•m3/s | 13~18 | 24~29 | 28~31 | ||||||
| N2-0 Mode | |||||||||||
| Power Supply | Phase/Volt/Freq. | 200V Model | 3Phase/200V/50Hz | ||||||||
| 3Phase/200-220V/60Hz | |||||||||||
| 400V Model | 3Phase/380-400V/50Hz | ||||||||||
| 3Phase/380-440V/60Hz | |||||||||||
| Power capacity | kVA | 4.6 | 7.3 | 8.2 | 8.5 | 12.7 | 15.1 | ||||
| Weight | kg | 260 | 300 | 380 | 430 | 500 | 550 | ||||
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© 2023 EBARA Technologies, Inc.
51 Main Avenue, Sacramento, CA 95838
