Model EST500WN

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EST500WN dry (oil free) vacuum pumps are designed as stand-alone screw pumps constructed of NiResist, a solid cast material known for its superior corrosion resistance, best suited for harsh, powdery and corrosive applications.

Specifically engineered for harsh applications generating reactive chemical by-products and manufactured to be the lowest cost of ownership pumps on the market today.

Pumping Speed (60 Hz): 30,000 l/min



  • Various Booster & Exhaust Thermal Configurations (Process Dependent)
  • Idle Mode (Green Energy Mode)
  • Hardware: Seismic Brackets
  • Pump Systems – Integrated Rack Solutions
  • Pump Installation Lifts
  • Reusable Shipping Crates


  • Oil-Free
  • Low Energy Consumption: High Performance Brushless DC Motors
  • Compact/Lightweight Small Footprint
  • Various Pump Configurations According to Process Applications
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Advanced Warning & Alarm Data Storage Capability
  • Hands On Feature for Warning Settings via Programmable LCD Controller
  • Ideal Configuration for Powdery Harsh & Chemically Corrosive Application (High Thermal Profile & NiResist Construction Material)
  • Large Pumping Capacity and High Gas Load Stability
  • Intelligent Rotor RPM Control Function for Flexible Gas Throughput
  • Variable Pumping Speed to Match Application Requirements
  • State-Of-The-Art Control and Monitoring Devices
  • SEMI S2, CE And NRTL


  • Atomic Layer Deposition (ALD)
  • Chemical Vapor Deposition (CVD) Processes Including LPCVD, HDP-CVD, SACVD & MOCVD
  • Etching
  • High Pumping Speed & High Gas Load Requirements
  • Rapid Thermal Processing (RTP)

Specifications - Model EST500WN

Pumping SpeedL/min1000250010000200003000050,000
Ultimate PressurePa2.70.4
ConnectionGas InletNW40NW50NW100ISO160
Gas OutletNW40
Approx. Power at Ultimate PressurekW2.333.24.54.6
UtilityCoolingFlow rateL/min5~8
WaterTemperatureMax. 30
N2 GasApprox. Flow ratePa•m3/s13~1824~2928~31
N2-0 Mode
Power SupplyPhase/Volt/Freq.200V Model3Phase/200V/50Hz
400V Model3Phase/380-400V/50Hz
Power capacitykVA4.