Harsh Duty – Model EV-M

List Price

The EV-M Dry vacuum pump series is designed for harsh process application featuring unique temperature control and on demand torque operation covering from 2,000 Lit/min up to 80,000 Lit/min pumping speed. The EV-M series is capable of processing harsh and light duty applications. This series is designed to consume much less power than previous pumps. A combination of root rotor arrangement and high torque motors and inverters make the EV-M series more energy efficient and the ideal solution for harsh process applications.

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Description

The EV-M Dry vacuum pump series is designed for harsh process application featuring unique temperature control and on demand torque operation covering from 88 to 2800 CFM. The EV-M series is capable of processing harsh and light duty applications. This series is designed to consume much less power than previous pumps. A combination of root rotor arrangement and high torque motors and inverters make the EV-M series more energy efficient and the ideal solution for harsh process applications.

Features

  • Enhancement for Product Throughput
  • Lower Cost of Ownership
  • Reducing Installation Space
  • Harsh Process Capability
  • Environmental-Responsive
  • High Torque Motor
  • Exhaust Jacket Heater
  • Electrical Plating on Rotor/Casing
  • Hot N2 Unit
  • BP Cooling Jacket
  • Water Leak Detector
  • SEMI, NRTL/CE

Applications

  • Metal Etch
  • PE-CVD
  • LP-CVD
  • TEOS
  • Nitride
  • Oxide

Specifications

UnitsEV-M20NEV-M102NEV-M202NEV-M302NEV-M502NEV-M802N
Pumping SpeedCFM88.3353.1706.31059.41765.72825.2
L/min25001000020000300005000080000
M3/Hr1506001200180030004800
Ultimate PressureTorr0.040.004
Pa50.5
mBar0.050.0005
ConnectionGas InletNW40ISO100ISO160ISO200
Gas OutletNW40
Approx. Power at Ultimate PressurekW1.21.81.92.52.12.8
UtilityCooling WaterFlow RateL/min3~83.5~8.04.0-8.05.0-8.0
Temperature°CMax. 30
°FMax. 86
N2 GasApprox. Flow Rate26-3138-33
Power SupplyPhase / Volt / Freq.200V Model3 Phase / 200V / 50Hz
3 Phase / 200-220V / 60Hz
400V Model3 Phase / 380-400V / 50Hz
3 Phase / 380 – 440V / 60Hz
460V Model3 Phase / 440-460V / 50Hz
3 Phase / 440-480V / 60Hz
Power CapacitykVA3.35.466.87.18.3
Weightlbs374.8705.5793.7881.81102.31631.4
kg170320360400500740