Harsh Duty – Model EV-M

List Price

The EV-M Dry vacuum pump series is designed for harsh process application featuring unique temperature control and on demand torque operation covering from 2,000 Lit/min up to 80,000 Lit/min pumping speed. The EV-M series is capable of processing harsh and light duty applications. This series is designed to consume much less power than previous pumps. A combination of root rotor arrangement and high torque motors and inverters make the EV-M series more energy efficient and the ideal solution for harsh process applications.

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Description

The EV-M Dry vacuum pump series is designed for harsh process application featuring unique temperature control and on demand torque operation covering from 88 to 2800 CFM. The EV-M series is capable of processing harsh and light duty applications. This series is designed to consume much less power than previous pumps. A combination of root rotor arrangement and high torque motors and inverters make the EV-M series more energy efficient and the ideal solution for harsh process applications.

Features

  • Enhancement for Product Throughput
  • Lower Cost of Ownership
  • Reducing Installation Space
  • Harsh Process Capability
  • Environmental-Responsive
  • High Torque Motor
  • Exhaust Jacket Heater
  • Electrical Plating on Rotor/Casing
  • Hot N2 Unit
  • BP Cooling Jacket
  • Water Leak Detector
  • SEMI, NRTL/CE

Applications

  • Metal Etch
  • PE-CVD
  • LP-CVD
  • TEOS
  • Nitride
  • Oxide

Specifications - Model EV-M