The Model EV-M102N dry vacuum pumps are designed for high-load applications where large volumes of reaction byproducts are generated. Its outstanding power consumption performance and enhanced corrosion resistance, as a standard, support a broad range of industry applications.
- Various Booster & Exhaust Thermal Configurations (Process Dependent)
- ESD Resistance
- Idle Mode (Green Energy Mode)
- Hardware: Seismic Brackets
- Pump Systems – Integrated Rack Solutions
- Pump Installation Lifts
- Reusable Shipping Crates
Typical applications for EV-M dry pumps include high load applications such as Atomic Layer Deposition (ALD), a variety of etch and CVD processes and harsher TEOS processes that require the best vacuum performance and optimum uptime.