The Model EV-M502N dry vacuum pumps are designed for high-load applications where large volumes of reaction byproducts are generated. Its outstanding power consumption performance and enhanced corrosion resistance, as a standard, support a broad range of industry applications.
Typical applications for EV-M dry pumps include high load applications such as Atomic Layer Deposition (ALD), a variety of etch and CVD processes and harsher TEOS processes that require the best vacuum performance and optimum uptime.
Pumping Speed (60 Hz): 50,000 l/min
Options:
| Model | EV-M | EV-M | EV-M | EV-M | EV-M | EV-M | ||||
| 20N | 102N | 202N | 302N | 502N | 802N | |||||
| Pumping Speed | L/min | 1,800 | 10,000 | 20,000 | 30,000 | 50,000 | 80,000 | |||
| Ultimate Pressure | Pa | 5 | 0.5 | |||||||
| Connection | Gas Inlet | NW40 | ISO100 | ISO160 | ISO200 | |||||
| Gas Outlet | NW40 | |||||||||
| Approx. Power at Ultimate Pressure | kW | 1.2 | 1.8 | 1.9 | 2.3 | 2.1 | 2.8 | |||
| Utility | Cooling | Flow rate | L/min | 3～8 | 3.5～8 | 4～8 | 5～8 | |||
| Water | Temperature | ℃ | Max. 30 | |||||||
| N2 Gas | Approx. Flow rate | Pa•m3/s | 26～31 | 28～33 | ||||||
| Power Supply | Phase/Volt/Freq. | 200V Model | 3Phase/200V/50Hz | |||||||
| 3Phase/200-220V/60Hz | ||||||||||
| 400V Model | 3Phase/380-400V/50Hz | |||||||||
| 3Phase/380-440V/60Hzz | ||||||||||
| 460V Model | 3Phase/440-460V/50Hz | |||||||||
| 3Phase/440-480V/60Hz | ||||||||||
| Power capacity | kVA | 3.3 | 5.4 | 6 | 6.8 | 7.1 | 8.3 | |||
| Weight | kg | 170 | 320 | 360 | 400 | 500 | 740 | |||
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51 Main Avenue, Sacramento, CA 95838
