Model ESA200W

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Pumping Speed (60 Hz): 20,000 l/min

Description

The Model ESA200W dry vacuum pump is utilized in light-gas application where large-volume light-gas pumping is observed such as MOCVD with larger ESA models best suited for fast pump down requirement on large volume chamber or load lock processes in industries such as LCD, photovoltaic manufacturing equipment.           

Options:

  • 3-Phase, 50/60 Hz, Dual Voltage 200VAC & 400VAC Models
  • Alternate Exhaust Configurations for Organic Solvents
  • NiResist Cast Material for Superior Corrosion Resistance
  • Idle Mode (Green Energy Mode)
  • Hardware: Seismic Brackets
  • Pump Systems – Integrated Rack Solutions
  • Pump Installation Lifts
  • Reusable Shipping Crates

Features

  • Oil-Free
  • Low Energy Consumption: High Performance Brushless DC Motors
  • Compact/Lightweight Small Footprint
  • Various Pump Configurations According to Process Applications
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Low-Vibration Operation
  • Advanced Warning & Alarm Data Storage Capability
  • Hands on Feature For Warning Settings via Programmable LCD Controller
  • Ideal Design for Fast Pumping on Large Volume Chamber
  • Intelligent Rotor RPM Control Function for Flexible Gas Throughput
  • Variable Pumping Speed to Match Application Requirements
  • State-Of-The-Art Control and Monitoring Devices
  • SEMI S2, CE and NRTL

Applications

  • Flat Panel Display (FPD)
  • High Content of Light Process Gases
  • Hydrogen Applications
  • Large Volume Chambers & Load Locks
  • Liquid Crystal Display (LCD)
  • Physical Vapor Deposition (PVD)
  • Thin Film Applications

Specifications - Model ESA200W

ModelESAESAESAESAESAESAESAESA
1525/S70W/WN80W/WN100W/WN200W300W500W
Pumping SpeedL/min1,4002,5007,0008,40010,00020,00028,00047,000
(50Hz)(50Hz)(50Hz)(50Hz)(50Hz)
1,7003,0008,40030,00050,000
(60Hz)(60Hz)(60Hz)(60Hz)(60Hz)
Ultimate PressurePa4005.30.27-0.40.13-0.270.13-0.270.530.530.53
(50Hz)(50Hz)(50Hz)
27040.13-0.27
60Hz)(60Hz)(60Hz)
ConnectionGas InletNW40NW50NW80ISO100ISO160
Gas OutletNW40
Approx.Power at Ultimate PressurekW2.9KW/2.6KW/3.6KW/4.24.93.2kW/6.6kW/5.1kW/
50Hz50Hz50Hz50Hz50Hz50Hz
3.2kW/2.9kW4.0kW/3.4kW7.3kW/6.7kW
60Hz/60Hz60Hz/60Hz60Hz/60Hz
UtilityCoolingFlow rateL/min3.5~86~9
WaterTemperatureMax. 30
N2 GasApprox.Pa•m3/s14~1717~2024~2754~5754~5717~207.5~8.5~11
Flow rate-4.6-3.8-4.7-3.810.5
N2-0 Mode
Power SupplyPhase/200V Model3Phase/200V/50Hz
Volt/3Phase/200-220V/60Hz
Freq.400V Model3Phase/380-400V/50Hz3Phase/380-400V/50Hz
3Phase/380-440V/60Hz3Phase/380-440V/60Hz
400V Model3Phase/ 440V/ 50Hz
3Phase/ 440-480V/ 60Hz
Power capacitykVA6.410.312.61223.741.3
Weightkg240380400410700750