Description
The Model ESA300W dry vacuum pump is utilized in light-gas application where large-volume light-gas pumping is observed such as MOCVD with larger ESA models best suited for fast pump down requirement on large volume chamber or load lock processes in industries such as LCD, photovoltaic manufacturing equipment.
Options:
- 3-Phase, 50/60 Hz, Dual Voltage 200VAC & 400VAC Models
- Alternate Exhaust Configurations for Organic Solvents
- NiResist Cast Material for Superior Corrosion Resistance
- Idle Mode (Green Energy Mode)
- Hardware: Seismic Brackets
- Pump Systems – Integrated Rack Solutions
- Pump Installation Lifts
- Reusable Shipping Crates