The Model ESA300W dry vacuum pump is utilized in light-gas application where large-volume light-gas pumping is observed such as MOCVD with larger ESA models best suited for fast pump down requirement on large volume chamber or load lock processes in industries such as LCD, photovoltaic manufacturing equipment.
Pumping Speed (60 Hz): 30,000 l/min
Options:
| Model | ESA | ESA | ESA | ESA | ESA | ESA | ESA | ESA | ||||
| 15 | 25/S | 70W/WN | 80W/WN | 100W/WN | 200W | 300W | 500W | |||||
| Pumping Speed | L/min | 1,400 | 2,500 | 7,000 | 8,400 | 10,000 | 20,000 | 28,000 | 47,000 | |||
| (50Hz) | (50Hz) | (50Hz) | (50Hz) | (50Hz) | ||||||||
| 1,700 | 3,000 | 8,400 | 30,000 | 50,000 | ||||||||
| (60Hz) | (60Hz) | (60Hz) | (60Hz) | (60Hz) | ||||||||
| Ultimate Pressure | Pa | 400 | 5.3 | 0.27-0.4 | 0.13-0.27 | 0.13-0.27 | 0.53 | 0.53 | 0.53 | |||
| (50Hz) | (50Hz) | (50Hz) | ||||||||||
| 270 | 4 | 0.13-0.27 | ||||||||||
| 60Hz) | (60Hz) | (60Hz) | ||||||||||
| Connection | Gas Inlet | NW40 | NW50 | NW80 | ISO100 | ISO160 | ||||||
| Gas Outlet | NW40 | |||||||||||
| Approx.Power at Ultimate Pressure | kW | 2.9KW/ | 2.6KW/ | 3.6KW/ | 4.2 | 4.9 | 3.2kW/ | 6.6kW/ | 5.1kW/ | |||
| 50Hz | 50Hz | 50Hz | 50Hz | 50Hz | 50Hz | |||||||
| 3.2kW/ | 2.9kW | 4.0kW/ | 3.4kW | 7.3kW/ | 6.7kW | |||||||
| 60Hz | /60Hz | 60Hz | /60Hz | 60Hz | /60Hz | |||||||
| Utility | Cooling | Flow rate | L/min | 3.5～8 | 6～9 | |||||||
| Water | Temperature | ℃ | Max. 30 | |||||||||
| N2 Gas | Approx. | Pa•m3/s | 14～17 | 17～20 | 24～27 | 54～57 | 54～57 | 17～20 | 7.5～ | 8.5～11 | ||
| Flow rate | -4.6 | -3.8 | -4.7 | -3.8 | 10.5 | |||||||
| N2-0 Mode | ||||||||||||
| Power Supply | Phase/ | 200V Model | 3Phase/200V/50Hz | |||||||||
| Volt/ | 3Phase/200-220V/60Hz | |||||||||||
| Freq. | 400V Model | 3Phase/380-400V/50Hz | – | 3Phase/380-400V/50Hz | ||||||||
| 3Phase/380-440V/60Hz | 3Phase/380-440V/60Hz | |||||||||||
| 400V Model | – | 3Phase/ 440V/ 50Hz | ||||||||||
| 3Phase/ 440-480V/ 60Hz | ||||||||||||
| Power capacity | kVA | 6.4 | 10.3 | 12.6 | 12 | 23.7 | 41.3 | |||||
| Weight | kg | 240 | 380 | 400 | 410 | 700 | 750 | |||||
© 2023 EBARA Technologies, Inc.
51 Main Avenue, Sacramento, CA 95838
