Model ESA70W

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Pumping Speed (60 Hz): 8,400 l/min

Description

The Model ESA70W dry vacuum pump is utilized in light-gas application where large-volume light-gas pumping is observed such as MOCVD with smaller ESA models best suited for light gas pumping.                       

Options:

  • 3-Phase, 50/60 Hz, Dual Voltage 200VAC & 400VAC Models
  • Alternate Exhaust Configurations for Organic Solvents
  • NiResist Cast Material for Superior Corrosion Resistance
  • Idle Mode (Green Energy Mode)
  • Hardware: Seismic Brackets
  • Pump Systems – Integrated Rack Solutions
  • Pump Installation Lifts
  • Reusable Shipping Crates

Typical applications for ESA dry pumps include medium to light duty process such as hydrogen handling, large load-lock applications that require the best vacuum performance and optimum uptime. The Model ESA70W-D is a dual voltage model (200VAC/400VAC) and is ideal for replacing legacy EBARA Model A70W dry vacuum pumps.

Features

  • Oil-Free
  • Low Energy Consumption: High Performance Brushless DC Motors
  • Compact/Lightweight Small Footprint
  • Various Pump Configurations According to Process Applications
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Low-Vibration Operation
  • Advanced Warning & Alarm Data Storage Capability
  • Hands on Feature For Warning Settings via Programmable LCD Controller
  • Ideal Design for Fast Pumping on Large Volume Chamber
  • Intelligent Rotor RPM Control Function for Flexible Gas Throughput
  • Variable Pumping Speed to Match Application Requirements
  • State-Of-The-Art Control and Monitoring Devices
  • SEMI S2, CE and NRTL

Applications

  • Chemical Vapor Deposition (CVD)
  • Flat Panel Display (FPD)
  • High Content of Light Process Gases
  • Hydrogen Applications
  • Large Volume Chambers
  • Liquid Crystal Display (LCD)
  • MOCVD
  • Thin Film Applications

Specifications - Model ESA70W

ModelESAESAESAESAESAESAESAESA
1525/S70W/WN80W/WN100W/WN200W300W500W
Pumping SpeedL/min1,4002,5007,0008,40010,00020,00028,00047,000
(50Hz)(50Hz)(50Hz)(50Hz)(50Hz)
1,7003,0008,40030,00050,000
(60Hz)(60Hz)(60Hz)(60Hz)(60Hz)
Ultimate PressurePa4005.30.27-0.40.13-0.270.13-0.270.530.530.53
(50Hz)(50Hz)(50Hz)
27040.13-0.27
60Hz)(60Hz)(60Hz)
ConnectionGas InletNW40NW50NW80ISO100ISO160
Gas OutletNW40
Approx.Power at Ultimate PressurekW2.9KW/2.6KW/3.6KW/4.24.93.2kW/6.6kW/5.1kW/
50Hz50Hz50Hz50Hz50Hz50Hz
3.2kW/2.9kW4.0kW/3.4kW7.3kW/6.7kW
60Hz/60Hz60Hz/60Hz60Hz/60Hz
UtilityCoolingFlow rateL/min3.5~86~9
WaterTemperatureMax. 30
N2 GasApprox.Pa•m3/s14~1717~2024~2754~5754~5717~207.5~8.5~11
Flow rate-4.6-3.8-4.7-3.810.5
N2-0 Mode
Power SupplyPhase/200V Model3Phase/200V/50Hz
Volt/3Phase/200-220V/60Hz
Freq.400V Model3Phase/380-400V/50Hz3Phase/380-400V/50Hz
3Phase/380-440V/60Hz3Phase/380-440V/60Hz
400V Model3Phase/ 440V/ 50Hz
3Phase/ 440-480V/ 60Hz
Power capacitykVA6.410.312.61223.741.3
Weightkg240380400410700750