Model ESA70W

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The Model ESA70W dry vacuum pump is utilized in light-gas application where large-volume light-gas pumping is observed such as MOCVD with smaller ESA models best suited for light gas pumping.

Typical applications for ESA dry pumps include medium to light duty process such as hydrogen handling, large load-lock applications that require the best vacuum performance and optimum uptime. It is ideal for replacing our legacy A Series EBARA Model A70W dry vacuum pumps.

Pumping Speed (60 Hz): 8,400 l/min

Description

Options:

  • 3-Phase, 50/60 Hz, Dual Voltage 200VAC or 400VAC
  • Alternate Exhaust Configurations for Organic Solvents
  • Optional NiResist Cast Material for Superior Corrosion Resistance
  • Idle Mode (Green Energy Mode)
  • Hardware: Seismic Brackets
  • Pump Systems – Integrated Rack Solutions
  • Pump Installation Lifts
  • Reusable Shipping Crates

Features

  • Oil-Free
  • Low Energy Consumption: High Performance Brushless DC Motors
  • Compact/Lightweight Small Footprint
  • Various Pump Configurations According to Process Applications
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Low-Vibration Operation
  • Advanced Warning & Alarm Data Storage Capability
  • Hands on Feature for Warning Settings via Programmable LCD Controller
  • Ideal Design for Fast Pumping on Large Volume Chamber
  • Intelligent Rotor RPM Control Function for Flexible Gas Throughput
  • Variable Pumping Speed to Match Application Requirements
  • State-Of-The-Art Control and Monitoring Devices
  • SEMI S2, CE and NRTL

Applications

  • Chemical Vapor Deposition (CVD)
  • Flat Panel Display (FPD)
  • High Content of Light Process Gases
  • Hydrogen Applications
  • Large Volume Chambers
  • Liquid Crystal Display (LCD)
  • MOCVD
  • Thin Film Applications

Specifications - Model ESA70W

ModelESAESAESAESAESAESAESAESA
1525/S70W/WN80W/WN100W/WN200W300W500W
Pumping SpeedL/min1,4002,5007,0008,40010,00020,00028,00047,000
(50Hz)(50Hz)(50Hz)(50Hz)(50Hz)
1,7003,0008,40030,00050,000
(60Hz)(60Hz)(60Hz)(60Hz)(60Hz)
Ultimate PressurePa4005.30.27-0.40.13-0.270.13-0.270.530.530.53
(50Hz)(50Hz)(50Hz)
27040.13-0.27
60Hz)(60Hz)(60Hz)
ConnectionGas InletNW40NW50NW80ISO100ISO160
Gas OutletNW40
Approx.Power at Ultimate PressurekW2.9KW/2.6KW/3.6KW/4.24.93.2kW/6.6kW/5.1kW/
50Hz50Hz50Hz50Hz50Hz50Hz
3.2kW/2.9kW4.0kW/3.4kW7.3kW/6.7kW
60Hz/60Hz60Hz/60Hz60Hz/60Hz
UtilityCoolingFlow rateL/min3.5~86~9
WaterTemperatureMax. 30
N2 GasApprox.Pa•m3/s14~1717~2024~2754~5754~5717~207.5~8.5~11
Flow rate-4.6-3.8-4.7-3.810.5
N2-0 Mode
Power SupplyPhase/200V Model3Phase/200V/50Hz
Volt/3Phase/200-220V/60Hz
Freq.400V Model3Phase/380-400V/50Hz3Phase/380-400V/50Hz
3Phase/380-440V/60Hz3Phase/380-440V/60Hz
400V Model3Phase/ 440V/ 50Hz
3Phase/ 440-480V/ 60Hz
Power capacitykVA6.410.312.61223.741.3
Weightkg240380400410700750