Light Duty – Model ESR

List Price

The ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr.

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Description

The ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr.

The ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and motor controls. These enhancements drastically reduces utility consumption (electrical power, cooling water, nitrogen, footprint) compared to AC motored pumps. Intelligent controls allow the ESR to be throttled down and be placed in an idle mode when not used for processing.

For clean applications, no nitrogen purge is required. A minimal amount of nitrogen purging along with the pump constructed out of NiResist (homogeneous steel alloy with high nickel content) makes the ESR ideal for pumping corrosive gases.

Features

  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • No Nitrogen purge required for ESR20N in clean applications
  • Variable pumping speed to match application requirements
  • High performance brushless DC motors
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked

Applications

  • Sputtering
  • PVD
  • Load Lock and Transfer
  • Ashing
  • Ion Implanter
  • Etch
  • Clean Gases and Processes