Light Duty – Model EV-S

List Price

The EV-S Series pumps are energy efficient vacuum pumps for clean to light duty processes. The pumping speeds range from 58 to 710 CFM with an ultimate pressure as low as 3 mTorr.

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Description

The EV-S Series pumps are energy efficient vacuum pumps for clean to light duty processes. The pumping speeds range from 58 to 710 CFM with an ultimate pressure as low as 3 mTorr.

Options include:

  • Nitrogen Purge
  • Niresist (Nickel alloy) to prevent corrosion
  • Idle Mode allows the tool to send a remotely controlled signal to save additional energy.

Features

  • Low Energy Consumption
  • Smallest Footprint
  • Excellent corrosion performance (N Type)
  • CE NRTL SEMI S2 Certified

Applications

  • SEM
  • Load Lock
  • Metal PDV
  • Dielectric ETCH
  • Ion Implant
  • Ashing