Description
The EV-S Series pumps are energy efficient vacuum pumps for clean to light duty processes. The pumping speeds range from 58 to 710 CFM with an ultimate pressure as low as 3 mTorr.
Options include:
- Nitrogen Purge
- Niresist (Nickel alloy) to prevent corrosion
- Idle Mode allows the tool to send a remotely controlled signal to save additional energy.
