Description
Options:
- N2 Purge Capability
- Hardware: Seismic Brackets
- Pump Systems – Integrated Rack Solutions
- Pump Installation Lifts
- Reusable Shipping Crates
Model EV-S100P
EBARA’s unique rotor design with roots type vacuum technology enables the Model EV-S100 dry vacuum pump to achieve world-class energy efficiency within a small footprint.
Typical applications for EV-S dry vacuum pumps include load locks, SEM, Etch, CVD, PVD, ashing and light etch processes that require the best vacuum performance and optimum uptime.
Pumping Speed (60 Hz): 10,000 l/min
Features
- Oil-Free
- Low Energy Consumption: High Performance Brushless DC Motors
- Compact/Lightweight Small Footprint
- Various Pump Configurations According to Process Applications
- Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
- Identical Pumping Performance Regardless of Frequency (50/60hz)
- Advanced Warning & Alarm Data Storage Capability
- Hands On Feature for Warning Settings via Programmable LCD Controller
- Advanced Sensing Function Reduces Product Down Time
- Semi S2, CE And NRTL
Applications
- Load lock and Transfer chambers
- Metrology Equipment
- Light Etch
- Ashing
- Physical Vapor Deposition (PVD)
Specifications - Model EV-S100
| Model | EV-S | EV-S | EV-S | EV-S | ||||
| 20/P/N | 50/P/N | 100/P/N | 200/P/N | |||||
| Pumping Speed | L/min | 1,670 | 5,000 | 10,000 | 20,000 | |||
| Ultimate Pressure | Pa | 3.0-5 | 0.5 | 0.5 | 0.5 | |||
| Connection | Gas Inlet | NW50 | NW80 | NW100 | ||||
| Gas Outlet | NW25 | NW40 | ||||||
| Approx.Power at Ultimate Pressure | kW | 0.4 | 0.55 | 0.65 | 0.75 | |||
| Utility | Cooling | Flow rate | L/min | 1.5～3.0 | 2.0～3.0 | |||
| Water | Temperature | ℃ | Max. 30 | |||||
| N2 Gas | Approx. Flow rate | Pa•m3/s | 17～20 | |||||
| N2-0 Mode | -2.4 | |||||||
| Power Supply | Phase/Volt/Freq. | 200V Model | 3Phase/200V/50Hz | |||||
| 3Phase/200-220V/60Hz | ||||||||
| 400V Model | 3Phase/380-400V/50Hz | |||||||
| 3Phase/380-440V/60Hz | ||||||||
| Power capacity | kVA | 3.2 | 4.8 | 6.4 | 6.8 | |||
| Weight | kg | 60 | 100 | 120 | 170 | |||
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51 Main Avenue, Sacramento, CA 95838
