Model EV-S100P

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Pumping Speed (60 Hz): 10,000 l/min

Category:

Description

EBARA’s unique rotor design with roots type vacuum technology enables the Model EV-S100 dry vacuum pump to achieve world-class energy efficiency within a small footprint.                        

Options:

  • N2 Purge Capability
  • Hardware: Seismic Brackets
  • Pump Systems – Integrated Rack Solutions
  • Pump Installation Lifts
  • Reusable Shipping Crates

Typical applications for EV-S dry vacuum pumps include load locks, SEM, Etch, CVD, PVD, ashing and light etch processes that require the best vacuum performance and optimum uptime.

Features

  • Oil-Free
  • Low Energy Consumption: High Performance Brushless DC Motors
  • Compact/Lightweight Small Footprint
  • Various Pump Configurations According to Process Applications
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Identical Pumping Performance Regardless of Frequency (50/60hz)
  • Advanced Warning & Alarm Data Storage Capability
  • Hands On Feature for Warning Settings via Programmable LCD Controller
  • Advanced Sensing Function Reduces Product Down Time
  • Semi S2, CE And NRTL

Applications

  • Load lock and Transfer chambers
  • Metrology Equipment
  • Light Etch
  • Ashing
  • Physical Vapor Deposition (PVD)

Specifications - Model EV-S100

ModelEV-SEV-SEV-SEV-S
20/P/N50/P/N100/P/N200/P/N
Pumping SpeedL/min1,6705,00010,00020,000
Ultimate PressurePa3.0-50.50.50.5
ConnectionGas InletNW50NW80NW100
Gas OutletNW25NW40
Approx.Power at Ultimate PressurekW0.40.550.650.75
UtilityCoolingFlow rateL/min1.5～3.02.0～3.0
WaterTemperature℃Max. 30
N2 GasApprox. Flow ratePa•m3/s17～20
N2-0 Mode-2.4
Power SupplyPhase/Volt/Freq.200V Model3Phase/200V/50Hz
3Phase/200-220V/60Hz
400V Model3Phase/380-400V/50Hz
3Phase/380-440V/60Hz
Power capacitykVA3.24.86.46.8
Weightkg60100120170

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51 Main Avenue, Sacramento, CA 95838