Description
Options:
- N2 Purge Capability
- Hardware: Seismic Brackets
- Pump Systems – Integrated Rack Solutions
- Pump Installation Lifts
- Reusable Shipping Crates
EBARA’s unique rotor design with roots type vacuum technology enables the EV-S200P dry vacuum pump to achieve world-class energy efficiency within a small footprint.
Typical applications for EV-S dry vacuum pumps include load locks, SEM, Metrology, PVD, ashing and light etch processes that require the best vacuum performance and optimum uptime.
Pumping Speed (60 Hz): 20,000 l/min
Options:
Model | EV-S | EV-S | EV-S | EV-S | ||||
20/P/N | 50/P/N | 100/P/N | 200/P/N | |||||
Pumping Speed | L/min | 1,670 | 5,000 | 10,000 | 20,000 | |||
Ultimate Pressure | Pa | 3.0-5 | 0.5 | 0.5 | 0.5 | |||
Connection | Gas Inlet | NW50 | NW80 | NW100 | ||||
Gas Outlet | NW25 | NW40 | ||||||
Approx.Power at Ultimate Pressure | kW | 0.4 | 0.55 | 0.65 | 0.75 | |||
Utility | Cooling | Flow rate | L/min | 1.5~3.0 | 2.0~3.0 | |||
Water | Temperature | ℃ | Max. 30 | |||||
N2 Gas | Approx. Flow rate | Pa•m3/s | 17~20 | |||||
N2-0 Mode | -2.4 | |||||||
Power Supply | Phase/Volt/Freq. | 200V Model | 3Phase/200V/50Hz | |||||
3Phase/200-220V/60Hz | ||||||||
400V Model | 3Phase/380-400V/50Hz | |||||||
3Phase/380-440V/60Hz | ||||||||
Power capacity | kVA | 3.2 | 4.8 | 6.4 | 6.8 | |||
Weight | kg | 60 | 100 | 120 | 170 |