EBARA’s unique rotor design, idling function combined with roots type vacuum technology enables the EV-S50 dry vacuum pump to achieve world-class energy efficiency within a small footprint.
- N2 Purge Capability
- NiResist Cast Material for Superior Corrosion Resistance
- Idle Mode (Green Energy Mode)
- Hardware: Seismic Brackets
- Pump Systems – Integrated Rack Solutions
- Pump Installation Lifts
- Reusable Shipping Crates
Typical applications for EV-S dry vacuum pumps include load locks, SEM, Etch, CVD, PVD, ashing and ion implant processes that require the best vacuum performance and optimum uptime.