Model EV-S50P

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EBARA’s unique rotor design with roots type vacuum technology enables the EV-S50 dry vacuum pump to achieve world-class energy efficiency within a small footprint.

Typical applications for EV-S dry vacuum pumps include load locks, SEM, metrology, PVD, ashing and light etch processes that require the best vacuum performance and optimum uptime.

Pumping Speed (60 Hz): 5,000 l/min



  • N2 Purge Capability
  • Hardware: Seismic Brackets
  • Pump Systems – Integrated Rack Solutions
  • Pump Installation Lifts
  • Reusable Shipping Crates


  • Oil-Free
  • Low Energy Consumption: High Performance Brushless DC Motors
  • Compact/Lightweight Small Footprint
  • Various Pump Configurations According to Process Applications
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Identical Pumping Performance Regardless of Frequency (50/60hz)
  • Advanced Warning & Alarm Data Storage Capability
  • Hands On Feature for Warning Settings via Programmable LCD Controller
  • Advanced Sensing Function Reduces Product Down Time
  • Semi S2, CE And NRTL


  • Ashing
  • Metrology
  • Etching
  • Ion Implant
  • Load Lock & Transfer
  • Physical Vapor Deposition (PVD)
  • SEM

Specifications - Model EV-S50

Pumping SpeedL/min1,6705,00010,00020,000
Ultimate PressurePa3.0-
ConnectionGas InletNW50NW80NW100
Gas OutletNW25NW40
Approx.Power at Ultimate PressurekW0.40.550.650.75
UtilityCoolingFlow rateL/min1.5~3.02.0~3.0
WaterTemperatureMax. 30
N2 GasApprox. Flow ratePa•m3/s17~20
N2-0 Mode-2.4
Power SupplyPhase/Volt/Freq.200V Model3Phase/200V/50Hz
400V Model3Phase/380-400V/50Hz
Power capacitykVA3.