Description
The A Series Dry Pumps offer a wide range of sizes and features for the Semiconductor, University and R&D industries. The A Series Dry Pumps were the first in the EBARA product line to offer manifold cooling, microprocessor controls and integrated windows-based pump monitoring systems. The A Series Pumps are designed to provide high reliability for a wide range of processes such as LPCVD, PECVD, and Etch.