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The A Series Dry Pumps offer a wide range of sizes and features for the Semiconductor, University and R&D industries. The A Series Dry Pumps were the first in the EBARA product line to offer manifold cooling, microprocessor controls and integrated windows-based pump monitoring systems. The A Series Pumps are designed to provide high reliability for a wide range of processes such as LPCVD, PECVD, and Etch.
The A Series Dry Pumps offer a wide range of sizes and features for the Semiconductor, University and R&D industries. The A Series Dry Pumps were the first in the EBARA product line to offer manifold cooling, microprocessor controls and integrated windows-based pump monitoring systems. The A Series Pumps are designed to provide high reliability for a wide range of processes such as LPCVD, PECVD, and Etch.
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51 Main Avenue, Sacramento, CA 95838
