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Model A150W-M

List Price $14,400.00

Pumping Speed 640 cfm : 18,000 l/min

In Stock? In stock

Description

The A Series dry pumps offer a wide range of sizes and features for the Semiconductor, University and R&D industries. The A Series dry pumps were the first in the EBARA product line to offer manifold cooling, Microprocessor Controls and Integrated windows based pump monitoring systems. The A Series pumps are designed to provide high reliability for a wide range of process such as LPCVD, PECVD, and Etch.

Specifications


Specifications - Model A150W-M

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Model A150W-M

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