Liquid Nitrogen Traps
EBARA's liquid nitrogen traps remove condensable gasses before they enter the mechanical pump and contaminate the oil. They also prevent mechanical pump oil vapors from contaminating the vacuum chamber. These traps actually act as a pump producing lower base pressures and faster pump down. Dual-tube traps can be attached to an automatic fill device, eliminating the necessity of manually refilling the reservoir with liquid nitrogen.
The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned without disassembling the system. For proper sealing, apply a light coating of Krytox lube when cleaning or replacing the O-ring. Coaxial port configurations, ISO, CF, EVAC or ASA flanges, electropolish finish and drain fittings are available.