Increase your system's throughput and extend preventative maintenance intervals by tw times or more with Ebara's LPCVD/TEO S multistage foreline traps. The first stage is a stainless steel gauze filter which collects crystalline TEO S before it reaches downstream piping and isolation valves.
The second stage is a 10 micron fiberglass filter which removes silicon dioxide which causes frequent PM's in throttling butterfly valves.
The third and final stage is a reservoir which collects liquid TEOS without restricting foreline conductance. The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. Standard finish is beadblasted. Electropolish is available on request.