Medium to High Vacuum Filtration

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Ebara’s Medium to High Vacuum Filtration systems is ideal for applications that utilize vacuum furnaces or deposition tools.

Features

  • Temp (continuous): min -15°F (-26°C ) max 220°F (104°C )
  • Positive sealing O-ring seal system
  • Carbon steel construction
  • Seamless drawn housings
  • Large dirt holding capacity and easy field cleaning, especially when mounted horizontally or inverted
  • Vacuum leak rate: Typecally 1×10-5mmHg (1×10-5mbar-L/sec)
  • Stainless steel ISO flanges
  • Electroless nickel finish

Applications

  • Leak Detection
  • Medical
  • Vacuum Pump-Rotary Piston
  • Vacuum Pump-Rotary Vane
  • Scroll Dry Pump
  • Backstreaming-Protect the system from pump fluid or particulate migration
  • Prevent dry scroll tip seal migration
  • Laser technology
  • Vacuum coating and lamination

Specifications

ISO FLANGE W/ BLACK FILTER ASSEMBLY FINISH

MODEL NUMBERINLET/OUTLET SIZEABCDSUGGESTED SERVICE HEIGHT E (IN)APPROX. WEIGHT (LBS)
WLNW1163 7/82 5/83 3/42 1/430.88
NW253 7/82 5/83 3/42 1/430.88
NW254 3/83 3/85 3/42 5/833
NW404 3/43 3/45 3/43 1/833
NW407 3/164 5/87 3/8555
K6311 11/1668 12/166 1/2915
K10016 1/88/313 1/48 9/161033

Specifications - Medium to High Vacuum Filtration

Material
Trap: Corrosive resistant carbon steel construction
Filter: Activated alumina, activated carbon, zeolite
Vacuum leak rate : 1 x 10-5 mbar L/s
Temperature range: -26°C to 104°C
Options: ISO body flanges, woven fiberglass or high capacity fiberglass filter, electropolish