Medium to High Vacuum Filtration

Request Quote

Ebara’s Medium to High Vacuum Filtration systems are ideal for applications that utilize vacuum furnaces or deposition tools.

Specifications

ISO FLANGE W/ BLACK FILTER ASSEMBLY FINISH

MODEL NUMBERINLET/OUTLET SIZEABCDSUGGESTED SERVICE HEIGHT E (IN)APPROX. WEIGHT (LBS)
WLNW1163 7/82 5/83 3/42 1/430.88
NW253 7/82 5/83 3/42 1/430.88
NW254 3/83 3/85 3/42 5/833
NW404 3/43 3/45 3/43 1/833
NW407 3/164 5/87 3/8555
K6311 11/1668 12/166 1/2915
K10016 1/88/313 1/48 9/161033

Specifications - Medium to High Vacuum Filtration

Material
Trap: Corrosive resistant carbon steel construction
Filter: Activated alumina, activated carbon, zeolite
Vacuum leak rate : 1 x 10-5 mbar L/s
Temperature range: -26°C to 104°C
Options: ISO body flanges, woven fiberglass or high capacity fiberglass filter, electropolish