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EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA's best know-how. The system is designed in accordance with customer's facility needs for customized integrated solutions.

Description

EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA’s best know-how. The system is designed in accordance with customer’s facility needs for customized integrated solutions.

Features

  • EBARA original integrated abatement system with EBARA dry pumps
  • Reduce installation workload and time, facility load
  • Operation and interlock function are integrated as system operation
  • Dry pump quantity 1~8 units
  • Applicable dry pump models: EV-S, ESR, EST, ESA
  • Applicable abatement models: G5, GT