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EBARA’s Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA’s best know-how. The system is designed in accordance with customer’s facility needs for customized integrated solutions. As we incorporate your facility requirements into the design process, our Gas Abatement System goes beyond industry standards. Whether you aim to reduce environmental impact or enhance operational efficiency, EBARA’s Gas Abatement System is engineered to exceed expectations, offering a greener and more efficient future.

Description

EBARA’s Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA’s best know-how. The system is designed in accordance with customer’s facility needs for customized integrated solutions. As we incorporate your facility requirements into the design process, our Gas Abatement System goes beyond industry standards. Whether you aim to reduce environmental impact or enhance operational efficiency, EBARA’s Gas Abatement System is engineered to exceed expectations, offering a greener and more efficient future.

Features

  • EBARA original integrated abatement system with EBARA dry pumps
  • Reduce installation workload and time, facility load
  • Operation and interlock function are integrated as system operation
  • Dry pump quantity 1~8 units
  • Applicable dry pump models: EV-S, ESR, EST, ESA
  • Applicable abatement models: G5, GT