Ozonized Water Generator – OZW Series

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The EBARA Ozonized water generator is capable of continuously feeding clean Ozonized water to meet the requirements of next-generation wet processes through the use of the high concentration ozone generator, OZC Series, a Teflon® hollow fiber membrane and the particle-free pump.

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Description

The EBARA Ozonized water generator is capable of continuously feeding clean Ozonized water to meet the requirements of next-generation wet processes through the use of the high concentration ozone generator, OZC Series, a Teflon® hollow fiber membrane and the particle-free pump.

Features

  • Steadily produces large volumes of ozone at ultra-high concentrations.
  • Achieves ultra clean ozone through the implementation of ceramic-coated electrodes and a sapphire dielectric.
  • Reduced footprint due to high volumes of ozone produced per unit of discharge area.
  • Equipped with ozone leak detector as standard equipment.
  • S2-93 compliant design. CE model available.
  • Basic Operation: Oxygen is passed through the trench discharger (an electric field) thus ionizing the oxygen molecules to react and produce ozone gas. The customer then can take the ozone gas and uses per their application.

Applications

  • SACVD TEOS based SiO2 deposition
  • Dry photoresist ashing
  • Sputtering
  • Dry and wet cleaning
  • Surface oxidation
  • Annealing of oxide layers
  • Ultrapure water disinfecting

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51 Main Avenue, Sacramento, CA 95838