Light Duty – Model EV-S

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With EBARA’s unique rotor design, idling function combined with roots type vacuum technology, the EV-S Series achieves world-class energy efficiency with a small footprint helping to reduce running costs. The EV-S Series vacuum pumps includes advanced technologies such as a unique exhaust pumping design which contributes to overall pumping performance around atmospheric pressure with identical pumping performance regardless of frequency (50/60 Hz).

Typical applications for EV-S dry vacuum pumps include load locks, SEM, etch, CVD, PVD, light etch and ashing processes that require the best vacuum performance and optimum uptime.

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ModelServicePrice
Model
EV-S20
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Model
EV-S20N
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Model
EV-S20P
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Model
EV-S20PA
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Model
EV-S21
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Model
EV-S30P
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Model
EV-S50
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Model
EV-S50N
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Model
EV-S50P
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Model
EV-S100
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Model
EV-S100N
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Model
EV-S100P
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Model
EV-S200
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Model
EV-S200N
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Model
EV-S200P
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