Ebara VSN Heater Control System

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The VSN™ Temperature Control System supplies a complete network of temperature control by providing each system an Operator Interface Panel and PID VSN™ Modules to each heater.

Description

zThe VSN™ Temperature Control System supplies a complete network of temperature control by providing each system an Operator Interface Panel and PID VSN™ Modules to each heater.

The New VSN™ (Vision) heater control system is designed to make monitoring and controlling all of your thermal solutions simple.  With a multi-color, high visibility LED “eye” built into each VSN™ Module, and red LED display, you can take one look at your heaters and know the current status.

The VSN™ Module can be operated as a free-standing PID temperature controller with RTD, J-Type, or K-Type Thermocouple feedback, capable of up to 7amps.  Or along with a complete system Operator Interface that is capable of monitoring and controlling 1—8 strings with up to 128 VSN™ Modules per string and 1024 VSN™ Modules per OI.

For applications where additional control is needed, The Operator Interface includes Ethernet and Wi-Fi capabilities which allow for Modbus communications for remote access and even email alerts for current heater status.

The VSN™ system is ETL approved to UL and CSA standards, in addition to being CE marked.

See your future in Thermal Solutions with EBARA Vision (VSN)

Features

  • Easy-to-use, full-color touchscreen interface
  • Control multiple chambers, lines, and tools from one interface
  • Expandable: It grows as your application grows
  • Capable of integrating with your central monitoring system
  • Precise temperature control throughout heating system
  • Improves system temperature uniformity
  • Complete fab and foundry heating system integration

Applications

  • Semiconductor Processing
    • Gas delivery lines
    • Pump foreline
    • Pump exhaust lines
  • Life Sciences
    • Laboratory equipment
    • Medical equipment

Specifications

VSN Operator Interface

  • Controls up to 8 strings with up to 128 temperature modules per string, up to 1,024 heaters
  • User-configurable graphical mapping and naming to match application
  • Provides complete control and system optimization
  • Sends e-mail alerts

VSN Modules

  • 1:1 control for EACH heater
  • Advanced temperature, safety, diagnostics, and power-savings features
  • LED display with highly visible status indicator light
  • Able to connect directly into CMS/HMI systems