Ebara Technologies is taking new strides in Thermal Solutions in order to provide the best maintenance for pump operation throughout various applications and has created an innovative, fast response heater designed to heat Nitrogen gas to temperatures of up to 200˚C. With a flow capacity of 300SLM, this is an excellent source of heated dilution gas for process components and smooth operation.
Vacuum pumps have the capability of being exposed to multiple gas species directly from a process tool. By introducing an inert gas such as Nitrogen at a controlled temperature and flow rate, the process gasses can be kept at a controlled temperature that will reduce the amount of reactions, condensation, and sublimation that can cause byproduct build up within the lines saving on maintenance time and expensive downtime for tools. Most LPCVD, Metal Etch, CVD, PECVD, FPD, and ALD users can all benefit from heated dilution solutions to reduce undesirable temperature reactions during process.
For user convenience, this unit was designed with a built-in Ebara (VSN) controller for temperature and flow control system for plug-and play operation, and works in tandem with the Ebara 10” touchscreen OI which is currently used in other Ebara Thermal Solutions. This association allows the user to adjust, set and monitor their desired temperature parameters locally or remotely via the Operator Interface.