Turbomolecular Vacuum Pumps
All of EBARA’s turbomolecular pumps are compound turbo pumps, adding a second molecular drag stage to the same shaft. Adding this stage increases the compression ratio of the pump and also greatly increases the highest allowable foreline pressure of the pump.
EBARA Technologies, Inc. offers two complete lines of turbomolecular pumps: the EMT series and the EBT series.
EBARA EMT Series Turbo Pumps
The EMT series turbomolecular pumps are 5-axis MagLev pumps that are completely hydrocarbon free. These pumps are suitable for varied applications from the harshest semiconductor application as well as ultra-high vacuum and ultra-low vibration applications.
EBARA EBT Series Turbo Pumps
The EBT series of turbomolecular pumps is a full line of ceramic bearing pumps suitable for Analytical and R&D vacuum needs. The EBT Ceramic Bearing system is extremely rugged, making it ideal for mobile applications. The EBT70 and EBT240 pumps are available with an integrated controller.