The Model EBT1100 Series are mechanical ceramic bearing compound turbomolecular pumps. The Model EBT1100 series are highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high vacuum applications.
Each model in the Model EBT1100 range offers exceptional value and is equipped with precision ceramic bearings for years of trouble free operation (>30,000hrs before replacement). The new compound design rotors can withstand infrequent shock treatment during high flow or vent conditions. Improved efficiency results in higher pumping speeds and gas compression. This accommodates higher foreline pressures making them ideal for multiple applications including UHV, mobile vacuum carts and analytical systems.
All EBARA EBT Series compound turbomolecular pumps are available with optional water or fan cooling and various flange configurations ISO-K, ISO-F, Conflat.