Model EBT1400

List Price

Pumping Speed N2 : 1400 l/s

Inlet Flange options: ISO-F200, CF200

Thumbnail Variation Title Short Description Sku Price Stock Length Weight Height Quantity Add to Cart Button
EBT1400FBWB ISO-F200 inlet flange, water cooled, pump only EBT1400FBWB $ 11340.00
EBT1400FCWB CF200 inlet flange, water cooled, pump only EBT1400FCWB $ 11664.00
EBT1400FBAB ISO-F200 inlet flange, air cooled (fan), pump only EBT1400FBAB $ 10200
EBT1400FCAB CF200 inlet flange, air cooled (fan), pump only EBT1400FCAB $ 11664.00


The Model EBT1400 Series are mechanical ceramic bearing compound turbomolecular pumps. The Model EBT1400 series are highly efficient, cost-effective solutions that provide clean and reliable vacuum generation for your high vacuum applications.

Each model in the Model EBT1400 range offers exceptional value and is equipped with precision ceramic bearings for years of trouble-free operation (>30,000 hrs before replacement). The new compound design rotors can withstand infrequent shock treatment during high flow or vent conditions. Improved efficiency results in higher pumping speeds and gas compression. This accommodates higher foreline pressures making them ideal for multiple applications including UHV, mobile vacuum carts and analytical systems.

All EBARA EBT Series compound turbomolecular pumps are available with optional water or fan cooling and various flange configurations ISO-K, ISO-F, and Conflat.

2D Drawings


  • Installation in Any Orientation
  • Long Life Ceramic Bearings
  • Energy Efficient Motors
  • Quick Start up
  • Quick Shut down (with air vent)
  • Durable structure for Air Inrush
  • Compact Size
  • Serial Communication
  • Automatic Calibration
  • Vibration Free (<0.25 micron)
  • Air or Water Cooled
  • Safety Standards UL, CE, SEMI, NRTL


  • UHV Vacuum Carts
  • Glass/Thin film coating systems
  • Metrology
  • PV/LED Manufacturing
  • Analytical Instruments
  • Research and Development

Specifications - Model EBT1400

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