Model EBT240

List Price

Pumping Speed N2 : 240 l/s

Inlet Flange options: ISO-K100, CF100

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Description

The Model EBT240 Series are mechanical ceramic bearing compound turbomolecular pumps. The Model EBT240 series are highly efficient, cost-effective solutions that provide clean and reliable vacuum generation for your high vacuum applications.

Each model in the Model EBT240 range offers exceptional value and is equipped with precision ceramic bearings for years of trouble-free operation (>30,000 hrs before replacement). The new compound design rotors can withstand infrequent shock treatment during high flow or vent conditions. Improved efficiency results in higher pumping speeds and gas compression. This accommodates higher foreline pressures making them ideal for multiple applications including UHV, mobile vacuum carts and analytical systems.

All EBARA EBT Series compound turbomolecular pumps are available with optional water or fan cooling and various flange configurations ISO-K, ISO-F, and Conflat.

 

2D Drawings


Features

  • Installation in Any Orientation
  • Long Life Ceramic Bearings
  • Energy Efficient Motors
  • Quick Start up
  • Quick Shut down (with air vent)
  • Durable structure for Air Inrush
  • Compact Size
  • Serial Communication
  • Automatic Calibration
  • Vibration Free (<0.25 micron)
  • Air or Water Cooled
  • Safety Standards UL, CE, SEMI, NRTL

Applications

  • UHV Vacuum Carts
  • Glass/Thin film coating systems
  • Metrology
  • PV/LED Manufacturing
  • Analytical Instruments
  • RGA/SEM
  • Research and Development

Specifications - EBT240

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