MagLev – Model EMT

List Price

The EMT Series magnetic turbomolecular pumps come in a variety of models including temperature-controlled, corrosion resistant, ultra-high vacuum (UHV) , ultra-low vibration and radiation resistant.

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Description

The EMT Series offers five major types of magnetic turbomolecular pumps:

  • temperature-controlled
  • corrosion resistant
  • ultra-low vibration
  • radiation resistant
  • ultra-high vacuum

All EBARA mag-lev turbo pumps features a wide pressure range with maximum back pressure up to 3 Torr.

Temperature-Controlled Turbo Pump

The temperature controlled model reduces the condensation rate of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

Ultra-High Vacuum Turbo Pump

Ultra-high vacuum models efficiently evacuate the lightest gases from high vacuum down to the ultra-high vacuum region by reducing the materials’ outgassing and improving the efficiency of hydrogen compression. EBARA’s ultra-high vacuum turbomolecular pump can achieve <1.5 x 10-9 Torr (10-8 Pa) with a short bake-out period.

Ultra-Low Vibration Turbo Pumps

EBARA’s ultra-low vibration model turbomolecular pump produce less than 1nm vibration amplitude – meeting today’s cutting edge challenges in EUV lithography, Micro-machining (MEMS), CD line width measurement, SEM/TEM Electron Microscopy, XPS and Nano-technology analytical tools.

Features

  • Full Magnetic Bearing
  • Installation in Any Orientation
  • High Throughput
  • Quick Starts and Stops
  • Compact Size
  • Communication Options Include Serial, RS232, RS485, EtherCat, Profibus and DeviceNet
  • Automatic Calibration
  • Rotational Speed Control
  • Energy Savings
  • Vibration Free
  • Air or Water Cooled
  • Safety Standards UL, CE, SEMI, NRTL