The Model EMT397 Series are magnetically levitated bearing compound turbomolecular pumps. The Model EMT397 series offer highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high vacuum applications.
Each model in the Model EMT397 range offers exceptional value and is equipped with the latest active maglev technology for years of reliable trouble free operation. Many maglev turbos are still in the field after 20 years operation. Our robust design can withstand infrequent shock treatment during high flow or vent conditions and the special coating of corrosive resistant models can handle the harshest chemistries. Improved rotor efficiency results in higher pumping speeds and gas compression. This accommodates higher foreline pressures making them ideal for multiple applications including semiconductor processes, in line coaters, UHV, beamlines and analytical systems.
All EBARA EMT Series maglev turbomolecular pumps are available with optional water or fan cooling and various flange configurations ISO-K, ISO-F, Conflat.