Features
- Reliable Maglev Technology
- Installation in Any Orientation
- Energy Efficient Motors
- Quick Start up
- Rapid Shut down (with air vent)
- Durable rotor design for high gas loads
- Multiple Communication options available
- Automatic Calibration
- Vibration Free
- Water Cooled
- Safety Standards UL, CE, SEMI, NRTL
Applications
- Biomed medical cyclotron
- Evaporation Technology e-beam, thermal
- Glass Coating inline, web
- High Energy Physics linear accelerator, beam lines
- Ion E-beam deposition, etch, sputter
- Semiconductor etch, pecvd, euv
- Solar / Flat panel manufacturing cvd, oled, inkjet
- Space Simulation satellites, avionics
- Thin Films R&D pecvd, pvd, sputter
