Ebara Pirani/Ionization Gauge

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The Ebara Pirani Ionization Gauge provides high consistencies measuring accurate process pressure controls. Compact design integrates High Pressure Hot Ionization and Pirani sensors measuring pressure at 1.5×10-6 Torr.



  • Compact design
  • Saves space and costs
  • Easy vacuum system installation
  • Accurate and consistent pressure measurements
  • Pirani load lock protects from premature wearing
  • Automatic adjustments high vacuum


  • Semiconductor, media, and electronics industries
  • Vacuum measurement and controls in low and high ranges