Ebara Triple Gauge

Request Quote

The Ebara Triple Gauge is designed in a single compact form and taking the place of three sensors, hot ion, convection enhanced, and vacuum switch.



  • Compact design saves cost and space
  • Ease of setup and installation
  • Pirani load lock protects from premature wearing
  • Automatic high vacuum adjustments


  • Semiconductor, media, and electronics industries
  • Vacuum measurement and controls in low and high ranges