Ebara Triple Gauge

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The Ebara Triple Gauge is designed in a single compact form and taking the place of three sensors, hot ion, convection enhanced, and vacuum switch.

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Features

  • Compact design saves cost and space
  • Ease of setup and installation
  • Pirani load lock protects from premature wearing
  • Automatic high vacuum adjustments

Applications

  • Semiconductor, media, and electronics industries
  • Vacuum measurement and controls in low and high ranges