EBARA Gauge Controller

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Your complete solution for process measurement and control. Compatible to all active gauges, the Model EGC controllers can monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the setpoint status.

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Description

Your complete solution for process measurement and control. Compatible to all active gauges, the Model EGC controllers can monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the setpoint status.

Features

  • Automatic identification of the connected EBARA Gauges
  • User selectable measurement unit (mbar, Torr, Pascal, micron)
  • High resolution – 16 bit A/D converter
  • Up to six adjustable setpoints with adjustable hysteresis, may be assigned to any channel
  • Programmable 0 to 10 V chart recorder output with logarithmic / linear characteristics for each gauge or gauge combination (Model EGC-3000 only)
  • Firmware upgrades available online are easily downloaded via the RS232C interface
  • Versatile, compact bench-top model design can easily be mounted in a panel or 19? rack
  • Wide range power supply 90 to 250V, 50 to 60 Hz

Applications

  • Fore and high vacuum pressure measurement
  • Pressure display in any vacuum range from just below atmosphere to ultra-high vacuum

Specifications -

TYPEUNITEGPC550
Tungsten
EGPC552
Nickel
EGPC554
Ceramic Coated
Measurement rangembar (Torr)5 x 10-5 …1500 (3.8×10-5 …125)
Accuracy5×10-4…1×10-3 mbar (N2) % of reading
1×10-3…100 mbar(N2) % of reading
100…950 mbar % of reading
950…1050 mbar % of reading
±50
±15
±5
±2.5
Repeatability1×10-3…1100 mbar(N2) % of reading±2
Supply voltage
Power consumption
without Fieldbus
DeviceNet
Profibus
V / A DC

W
W
W

±15…30

≤2.5
≤3
≤3

Setpoint relay
Range (N2)
Relay contact
Hysteresis
Contact rating
Solid state relays
Mechanical relays
Switching time
mbar

% of threshold

V / A DC
V / A DC
ms

2
5×10-5…1500
n.o., potential free
10

≤30 / ≤0.3
≤30 / ≤1
≤30

Interface (digital)RS232C
Cable length
RS232C operation
m (ft)≤100 (≤330)
≤30 (≤100)
Materials exposed to vacuumW, Ni, NiFe, Al2O3, SnAg, stainless steel, glassNi, NiFe, Al2O3, SnAg, stainless steel, glassAl2O3,stainless steel