Ebara Pirani/Capacitance Gauge

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EBARA Technologies, Inc. Pirani/Capacitance gauges combine the wide measurement range of a Pirani gauge with the gas independent accuracy at atmosphere of a capacitance gauge. The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints. Pirani/Capacitance gauges typically would be used in applications where high accuracy at atmosphere is required such as Loadlocks.

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Description

EBARA Technologies, Inc. Pirani/Capacitance gauges combine the wide measurement range of a Pirani gauge with the gas independent accuracy at atmosphere of a capacitance gauge. The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints. Pirani/Capacitance gauges typically would be used in applications where high accuracy at atmosphere is required such as Loadlocks.

Features

  • Gas-type independent above 10 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable atmospheric pressure detection
  • Fast atmospheric detection – eliminates waiting time and shortens process cycle
  • Mount in any orientation
  • Available with Tungsten or Nickel filament or with a fully ceramic coated sensor unit for highly corrosive applications
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Eligible output signal for easy integration
  • Diagnostic port
  • Optional atmospheric switch, display and digital interfaces

Applications

  • Load lock control
  • Fore vacuum pressure measurement
  • Safet circuits in vacuum systems
  • General vacuum measurement and control in the medium and rough vacuum range

Specifications -

TYPEUNITEGPC550
Tungsten
EGPC552
Nickel
EGPC554
Ceramic Coated
Measurement rangembar (Torr)5 x 10-5 …1500 (3.8×10-5 …1125)
Accuracy5×10-4…1×10-3 mbar (N2) % of reading
1×10-3…100 mbar(N2) % of reading
100…950 mbar % of reading
950…1050 mbar % of reading
±50
±15
±5
±2.5
Repeatability1×10-3…1100 mbar(N2) % of reading±2
Supply voltage
Power consumption
without Fieldbus
DeviceNet
Profibus
V / A DC

W
W
W

±15…30

≤2.5
≤3
≤3

Setpoint relay
Range (N2)
Relay contact
Hysteresis
Contact rating
Solid state relays
Mechanical relays
Switching time
mbar

% of threshold

V / A DC
V / A DC
ms

2
5×10-5…1500
n.o., potential free
10≤30 / ≤0.3
≤30 / ≤1
≤30
Interface (digital)RS232C
Cable length
RS232C operation
m (ft)≤100 (≤330)
≤30 (≤100)
Materials exposed to vacuumW, Ni, NiFe, Al2O3, SnAg, stainless steel, glassNi, NiFe, Al2O3, SnAg, stainless steel, glassAl2O3,stainless steel