Pirani/Capacitance Gauge - Model EGPC
EBARA Technologies, Inc. Pirani/Capacitance gauges combine the wide measurement range of a Pirani gauge with the gas independent accuracy at atmosphere of a capacitance gauge. The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints. Pirani/Capacitance gauges typically would be used in applications where high accuracy at atmosphere is required such as Loadlocks.